Dr. Dmitriy L. Voronov Profile

Dr. Dmitriy L. Voronov

Staff scientist at Lawrence Berkeley National Lab

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Author

Publications (29)

Proceedings Article | 4 October 2023 Presentation

Development of ultra-precise low blaze angle gratings at ALS

Sooyeon Park, Dmitriy Voronov, Eric Gullikson, Fahard Salmassi, Howard Padmore

Proceedings Volume PC12694, PC1269407 (2023) https://doi.org/10.1117/12.2678573

KEYWORDS: Blazed gratings, Diffraction gratings, Optical gratings, Plasma etching, Etching, Silicon, Polymers, Plasma, X-rays, X-ray diffraction

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Proceedings Article | 4 October 2022 Presentation + Paper

Fabrication of low blaze angle gratings by replication and plasma etch

Sooyeon Park, Dmitriy Voronov, Antoine Wojdyla, Eric Gullikson, Fahard Salmassi, Howard Padmore

Proceedings Volume 12240, 1224008 (2022) https://doi.org/10.1117/12.2633512

KEYWORDS: Plasma etching, Etching, Diffraction gratings, Silicon, Plasma, Quartz, Diffraction, Photoresist processing, Atomic force microscopy, X-rays

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Proceedings Article | 21 September 2021 Presentation + Paper

Low blaze angle gratings for x-ray and EUV applications

Sooyeon Park, Dmitriy Voronov, Eric Gullikson, Fahard Salmassi, Howard Padmore

Proceedings Volume 11837, 118370I (2021) https://doi.org/10.1117/12.2596269

KEYWORDS: Etching, Diffraction gratings, Plasma etching, Silicon, Diffraction, Plasma, X-rays, Neodymium, Polymers, Free electron lasers

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Proceedings Article | 21 August 2020 Presentation + Paper

Optimization of saw-tooth surface planarization for ultra-low blaze angle gratings for ALS-U

Sooyeon Park, Dmitriy Voronov, Howard Padmore

Proceedings Volume 11491, 1149108 (2020) https://doi.org/10.1117/12.2568712

KEYWORDS: Ultraviolet radiation, Plasma etching, Diffraction gratings, Etching, Liquids, Capillaries, Silicon, Solids, Plasma

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Proceedings Article | 9 September 2019 Presentation + Paper

Precise control of the blaze angle of x-ray diffraction gratings via planarization and plasma etching

Dmitriy Voronov, Sooyeon Park, Howard Padmore

Proceedings Volume 11108, 111080N (2019) https://doi.org/10.1117/12.2531188

KEYWORDS: Plasma etching, Etching, Plasma, Argon, Silicon, Diffraction gratings, Plasma enhanced chemical vapor deposition, Sputter deposition, X-ray diffraction

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Proceedings Article | 1 June 2018 Presentation + Paper

Speckle metrology for extreme ultra-violet lithography

A. Shanker, L. Waller, G. Gunjala, A. Wojdyla, D. Voronov, P. Naulleau

Proceedings Volume 10583, 105830T (2018) https://doi.org/10.1117/12.2299605

KEYWORDS: Speckle, Photoresist materials, Extreme ultraviolet lithography, Stochastic processes, Extreme ultraviolet, Fractal analysis, EUV optics, Atomic force microscopy, Line edge roughness, Image processing

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Proceedings Article | 23 August 2017 Presentation + Paper

Full size x-ray grating fabrication using large area nanoimprint

D. Voronov, P. Lum, H. Padmore

Proceedings Volume 10386, 1038607 (2017) https://doi.org/10.1117/12.2279436

KEYWORDS: Diffraction gratings, Nanoimprint lithography, Electron beam lithography, X-ray optics

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Proceedings Article | 15 September 2016 Presentation + Paper

High efficiency diffraction grating for EUV lithography beamline monochromator

D. Voronov, T. Warwick, E. Gullikson, F. Salmassi, P. Naulleau, N. Artemiev, P. Lum, H. Padmore

Proceedings Volume 9963, 996306 (2016) https://doi.org/10.1117/12.2238303

KEYWORDS: Diffraction gratings, Diffraction, X-rays, X-ray diffraction, Etching, Extreme ultraviolet lithography, Monochromators, Plasma etching, Wet etching, Direct write lithography

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Proceedings Article | 5 September 2014 Paper

Variable line spacing diffraction grating fabricated by direct write lithography for synchrotron beamline applications

D. Voronov, T. Warwick, E. Gullikson, F. Salmassi, P. Naulleau, N. Artemiev, P. Lum, H. Padmore

Proceedings Volume 9207, 920706 (2014) https://doi.org/10.1117/12.2062340

KEYWORDS: Diffraction gratings, Wavefronts, Diffraction, Silicon, Plasma etching, Direct write lithography, Monochromators, Fabrication, Coating, X-ray diffraction

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Proceedings Article | 27 September 2013 Paper

Fabrication of x-ray gratings by direct write maskless lithography

D. Voronov, S. Diez, P. Lum, S. Hidalgo, T. Warwick, N. Artemiev, H. Padmore

Proceedings Volume 8848, 88480Q (2013) https://doi.org/10.1117/12.2024489

KEYWORDS: Diffraction gratings, Wavefronts, X-rays, Plasma etching, Diffraction, Etching, Fabrication, Holography, Plasma, Silicon

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SPIE Journal Paper | 20 September 2013

Effect of working gas pressure on interlayer mixing in magnetron-deposited Mo/Si multilayers

Yuriy Pershyn, Eric Gullikson, Valeriy Kondratenko, Valentine Mamon, Svetlana Reutskaya, Dmitriy Voronov, Evgeniy Zubarev, Igor Artyukov, Alexander Vinogradov

OE, Vol. 52, Issue 09, 095104, (September 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.9.095104

KEYWORDS: Molybdenum, Silicon, Argon, Interfaces, Chemical species, X-rays, Transmission electron microscopy, Reflectivity, Sputter deposition, Extreme ultraviolet

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Proceedings Article | 28 September 2011 Paper

The influence of working gas pressure on interlayer mixing in magnetron-deposited Mo/Si multilayers

Y. Pershyn, E. Gullikson, I. Artyukov, V. Kondratenko, V. Sevryukova, D. Voronov, E. Zubarev, A. Vinogradov

Proceedings Volume 8139, 81390N (2011) https://doi.org/10.1117/12.892324

KEYWORDS: Molybdenum, Interfaces, Argon, Reflectivity, Silicon, Extreme ultraviolet, Sputter deposition, Transmission electron microscopy, X-rays, Crystals

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Proceedings Article | 28 September 2011 Paper

Roughening and smoothing behavior of Al/Zr multilayers grown on flat and saw-tooth substrates

D. Voronov, E. Anderson, R. Cambie, E. Gullikson, F. Salmassi, T. Warwick, V. Yashchuk, H. Padmore

Proceedings Volume 8139, 81390B (2011) https://doi.org/10.1117/12.893774

KEYWORDS: Multilayers, Diffusion, Silicon, Diffraction gratings, Semiconducting wafers, Coating, X-rays, Atomic force microscopy, X-ray diffraction, Solids

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SPIE Journal Paper | 1 September 2011 Open Access

Calibration of the modulation transfer function of surface profilometers with binary pseudorandom test standards: expanding the application range to Fizeau interferometers and electron microscopes

Valeriy Yashchuk, Samuel Barber, Wayne McKinney, Dmitriy Voronov, Erik Anderson, Nathalie Bouet, Raymond Conley, Rossana Cambie, Peter Takacs

OE, Vol. 50, Issue 09, 093604, (September 2011) https://doi.org/10.1117/12.10.1117/1.3622485

KEYWORDS: Modulation transfer functions, Calibration, Transmission electron microscopy, Scanning electron microscopy, Electron microscopes, Binary data, Interferometers, Profilometers, Spatial frequencies, Microscopes

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Proceedings Article | 2 September 2010 Paper

Calibration of the modulation transfer function of surface profilometers with binary pseudo-random test standards: expanding the application range

Valeriy Yashchuk, Erik Anderson, Samuel Barber, Nathalie Bouet, Rossana Cambie, Raymond Conley, Wayne McKinney, Peter Takacs, Dmitriy Voronov

Proceedings Volume 7801, 78010B (2010) https://doi.org/10.1117/12.860049

KEYWORDS: Modulation transfer functions, Transmission electron microscopy, Scanning electron microscopy, Calibration, Binary data, Interferometers, Electron microscopes, Silicon, Spatial frequencies, Interferometry

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Proceedings Article | 27 August 2010 Paper

High-efficiency multilayer blazed gratings for EUV and soft x-rays: recent developments

Dmitriy Voronov, Minseung Ahn, Eric Anderson, Rossana Cambie, Chih-Hao Chang, Leonid Goray, Eric Gullikson, Ralf Heilmann, Farhad Salmassi, Mark Schattenburg, Tony Warwick, Valeriy Yashchuk, Howard Padmore

Proceedings Volume 7802, 780207 (2010) https://doi.org/10.1117/12.861287

KEYWORDS: Diffraction gratings, Multilayers, Silicon, Diffraction, Transmission electron microscopy, Etching, Chemical species, Diffusion, Extreme ultraviolet, X-rays

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SPIE Journal Paper | 1 May 2010

Stability of modulation transfer function calibration of surface profilometers using binary pseudo-random gratings and arrays with nonideal groove shapes

Samuel Barber, Erik Anderson, Rossana Cambie, Stefano Marchesini, Wayne McKinney, Peter Takacs, Dmitry Vorornov, Valeriy Yashchuk

OE, Vol. 49, Issue 05, 053606, (May 2010) https://doi.org/10.1117/12.10.1117/1.3431659

KEYWORDS: Modulation transfer functions, Calibration, Spatial frequencies, Binary data, Profilometers, Etching, Microscopes, Scanning probe microscopy, Interferometry, Silicon

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Proceedings Article | 9 September 2009 Paper

5000 groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range

Dmitriy Voronov, Erik Anderson, Rossana Cambie, Farhad Salmassi, Eric Gullikson, Valeriy Yashchuk, Howard Padmore, Minseung Ahn, Chih-Hao Chang, Ralf Heilmann, Mark Schattenburg

Proceedings Volume 7448, 74480J (2009) https://doi.org/10.1117/12.826921

KEYWORDS: Diffraction gratings, Multilayers, Etching, Silicon, Diffraction, Semiconducting wafers, Scanning probe microscopy, Extreme ultraviolet, Anisotropic etching, X-rays

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Proceedings Article | 4 September 2009 Paper

Binary pseudo-random gratings and arrays for calibration of the modulation transfer function of surface profilometers: recent developments

Samuel Barber, Paul Soldate, Erik Anderson, Rossana Cambie, Stefano Marchesini, Wayne McKinney, Peter Takacs, Dmitriy Voronov, Valeriy Yashchuk

Proceedings Volume 7448, 744803 (2009) https://doi.org/10.1117/12.825389

KEYWORDS: Modulation transfer functions, Spatial frequencies, Calibration, Scanning probe microscopy, Binary data, Profilometers, Etching, Silicon, Sensors, Microscopes

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Proceedings Article | 3 September 2008 Paper

Graded multilayer mirrors for the carbon window Schwarzschild objective

Igor Artyukov, Yegor Bugayev, Oleksandr Devizenko, Eric Gullikson, Valeriy Kondratenko, Yuri Uspenski, Alexander Vinogradov, Dmytro Voronov

Proceedings Volume 7077, 70771T (2008) https://doi.org/10.1117/12.796146

KEYWORDS: Mirrors, Multilayers, Reflectivity, X-rays, Objectives, Carbon, Optical coatings, Hard x-rays, X-ray optics, Spherical lenses

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Proceedings Article | 3 September 2008 Paper

Fabrication and characterization of a new high density Sc/Si multilayer sliced grating

Dmitriy Voronov, Rossana Cambie, Eric Gullikson, Valeriy Yashchuk, Howard Padmore, Yuri Pershin, Alexander Ponomarenko, Valeriy Kondratenko

Proceedings Volume 7077, 707708 (2008) https://doi.org/10.1117/12.795377

KEYWORDS: Multilayers, Diffraction gratings, Etching, Diffraction, Prototyping, Silicon, X-rays, Semiconducting wafers, Coating, Polishing

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Proceedings Article | 12 October 2007 Paper

Structural transformations in Sc/Si multilayers irradiated by EUV lasers

Dmitriy Voronov, Evgeniy Zubarev, Yuriy Pershyn, Victoriya Sevryukova, Valeriy Kondratenko, Alexander Vinogradov, Igor Artioukov, Yuriy Uspenskiy, Michael Grisham, Georgiy Vaschenko, Carmen Menoni, Jorge Rocca

Proceedings Volume 6702, 67020U (2007) https://doi.org/10.1117/12.732705

KEYWORDS: Silicon, Extreme ultraviolet, Multilayers, Transmission electron microscopy, Laser ablation, Crystals, Laser irradiation, Laser damage threshold, Pulsed laser operation, Amorphous silicon

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Proceedings Article | 20 September 2007 Paper

Development of an ultrahigh-resolution diffraction grating for soft x-rays

Dmitriy Voronov, Rossana Cambie, Ruslan Feshchenko, Eric Gullikson, Howard Padmore, Alexander Vinogradov, Valeriy Yashchuk

Proceedings Volume 6705, 67050E (2007) https://doi.org/10.1117/12.732658

KEYWORDS: Diffraction gratings, Diffraction, X-rays, Multilayers, Spectral resolution, X-ray diffraction, Scattering, Distortion, Reflectivity, Tolerancing

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Proceedings Article | 7 December 2006 Paper

Dispersive properties of Co/C sliced multilayer gratings for the 4.4-5 nm wavelength interval

E. Bugaev, R. Feshchenko, A. Vinogradov, D. Voronov, V. Tokarev, V. Petukhov

Proceedings Volume 5974, 59741F (2006) https://doi.org/10.1117/12.640286

KEYWORDS: Multilayers, Diffraction gratings, Coating, Plasma, Diffraction, Spectroscopy, X-rays, Carbon, Aluminum, Spectral resolution

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Proceedings Article | 10 September 2005 Paper

Sliced multilayer gratings (SMG) based on Co/C multilayer coatings for the carbon window (4.4-5 nm)

E. A. Bugaev, R. M. Feschenko, A. V. Vinogradov, D. L. Vorornov, V. A. Tokarev, V. P. Petukhov

Proceedings Volume 5918, 591817 (2005) https://doi.org/10.1117/12.616841

KEYWORDS: Multilayers, Diffraction gratings, Carbon, X-rays, Laser applications, Synchrotrons, X-ray sources, Extreme ultraviolet, EUV optics, X-ray optics

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Proceedings Article | 10 November 2004 Paper

Study of irradiation damage of Sc/Si multilayer mirrors with a 46.9-nm tabletop laser

Georgiy Vaschenko, Michael Grisham, Carmen Menoni, Jorge Rocca, Yuriy Pershin, Evgeniy Zubarev, Dmitrii Voronov, Viktoria Sevryukova, Valeriy Kondratenko, Alexander Vinogradov, Igor Artioukov

Proceedings Volume 5534, (2004) https://doi.org/10.1117/12.557952

KEYWORDS: Mirrors, Multilayers, Silicon, Extreme ultraviolet, Laser damage threshold, Extreme ultraviolet lithography, Argon ion lasers, Borosilicate glass, Transmission electron microscopy, X-ray diffraction

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Proceedings Article | 19 December 2003 Paper

Recent results in capillary discharge soft x-ray laser research

Jorge Rocca, Mario Marconi, Yong Wang, Bradley Luther, Francesco Pedacci, Michael Grisham, Georgiy Vaschenko, Carmen Menoni, Jorge Filevich, Libor Juha, Yu. Pershin, E. Zubarev, D. Voronov, V. Sevryukova, V. Kondratenko, Vyacheslav Shlyaptsev, Alexander Vinogradov, Igor Artioukov

Proceedings Volume 5197, (2003) https://doi.org/10.1117/12.510944

KEYWORDS: Capillaries, Plasma, Silicon, Laser ablation, Multilayers, X-ray lasers, Mirrors, Laser damage threshold, Waveguides, Polymethylmethacrylate

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Proceedings Article | 12 December 2001 Paper

Structure, thermal stability, and reflectivity of Sc/Si and Sc/W/Si/W multilayer x-ray mirrors

Alexander Vinogradov, Yurii Pershin, Eugeniy Zubaryev, Dmitrii Voronov, Oleg Penkov, Valerii Kondratenko, Yurii Uspenskii, Igor Artioukov, John Seely

Proceedings Volume 4505, (2001) https://doi.org/10.1117/12.450595

KEYWORDS: Multilayers, Silicon, Reflectivity, Mirrors, Scandium, Annealing, X-rays, Transmission electron microscopy, Tungsten, Sputter deposition

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Proceedings Article | 11 July 1997 Paper

Sliced zone plate for hard x-ray sources: manufacturing and testing

Victor Asadchikov, Valentin Beloglazov, Alexander Vinogradov, Dmitrii Voronov, V. Kondratenko, Yu. Kopylov, N. Lebedev, A. Ponomarenko, Alexei Popov, Andrei Postnov, Anatoli Fedorenko

Proceedings Volume 3113, (1997) https://doi.org/10.1117/12.278865

KEYWORDS: Zone plates, X-rays, Diffraction, Hard x-rays, Sensors, Manufacturing, Optical properties, Software development, Coating, Copper

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Showing 5 of 29 publications

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