Dr. Emrah Bostan Profile

Dr. Emrah Bostan

at Univ of California Berkeley

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Publications (1)

Proceedings Article | 5 March 2021 Presentation + Paper

Simultaneous recovery of phase and defocus from coherent through-focus intensity images

Jingshan Zhong, Emrah Bostan, Dihong Tian, Laura Waller

Proceedings Volume 11653, 116530Z (2021) https://doi.org/10.1117/12.2575823

KEYWORDS: Phase imaging, Imaging systems, Visualization, Photomasks, Phase retrieval, Optical inspection, Microscopes, Lithography, Lithographic illumination, Inspection

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