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Eric M. Apelgren
at Spansion Inc
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 5 April 2007 Paper
Litho cell control using MPX
Proceedings Volume 6518, 65182R (2007) https://doi.org/10.1117/12.712694
KEYWORDS: Semiconducting wafers, Scanners, Finite element methods, Metrology, Image processing, Calibration, Reticles, Data modeling, Wafer testing, Wafer-level optics
Proceedings Article | 26 June 2003 Paper
Study of the influence of substrate topography on the focusing performance of advanced lithography scanners
Bruno La Fontaine, Jan Hauschild, Mircea Dusa, Alden Acheta, Eric Apelgren, Marc Boonman, Jouke Krist, Ashok Khathuria, Harry Levinson, Anita Fumar-Pici, Marco Pieters
Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485535
KEYWORDS: Semiconducting wafers, Scanners, Etching, Silicon, Metrology, Lithography, Thin films, Computer simulations, Overlay metrology, Polishing
Proceedings Article | 30 July 2002 Paper
Evaluation and characterization of flare in ArF lithography
Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474528
KEYWORDS: Modulation transfer functions, Lithography, Semiconducting wafers, Photomasks, Contamination, Stray light, Imaging systems, 193nm lithography, Image processing, Critical dimension metrology
Proceedings Article | 4 August 1993 Paper
Positive DUV resist (APEX-E) by IBM for SVGL Micrascan
Vasanti Deshpande, Nathan Thane, John Hargreaves, Yumiko Takamori, Eric Apelgren, Peter Freeman, Karey Holland
Proceedings Volume 1926, (1993) https://doi.org/10.1117/12.148938
KEYWORDS: Semiconducting wafers, Thin film coatings, Deep ultraviolet, Scanning electron microscopy, Metals, Image processing, Etching, Cadmium, Photoresist processing, Tin
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