Mr. Erwin Deng Profile

Erwin Deng

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Publications (7)

Proceedings Article | 12 June 2018 Paper

Achieve high hotspot detection accuracy by pattern scoring

Xiang Fang, Shou-Yuan Ma, Chien-Nan Lin, Hsu-Tang Liu, Chuan-Chun Lee, Chuen-Huei Yang, I-Y. Chang, Erwin Deng, Ming-Feng Shen, Min-Ying Lu, Ling-Chieh Lin, Hung-Yueh Liao, Elven Huang, Jonathan Muirhead

Proceedings Volume 10807, 108070L (2018) https://doi.org/10.1117/12.2323956

KEYWORDS: Design for manufacturing, Databases, Rule based systems, Semiconducting wafers, System identification, Visualization, Photomasks, Lutetium, Microelectronics, Design for manufacturability

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Proceedings Article | 13 July 2017 Paper

Cycle time reduction by Html report in mask checking flow

Jian-Cheng Chen, Min-Ying Lu, Xiang Fang, Ming-Feng Shen, Shou-Yuan Ma, Chuen-Huei Yang, Joe Tsai, Rachel Lee, Erwin Deng, Ling-Chieh Lin, Hung-Yueh Liao, Jenny Tsai, Amanda Bowhill, Hien Vu, Gordon Russell

Proceedings Volume 10454, 104540G (2017) https://doi.org/10.1117/12.2278691

KEYWORDS: Reticles, Databases

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Proceedings Article | 10 May 2016 Paper

Production mask composition checking flow

Shou-Yuan Ma, Chuen-Huei Yang, Joe Tsai, Alice Wang, Roger Lin, Rachel Lee, Erwin Deng, Ling-Chieh Lin, Hung-Yueh Liao, Jenny Tsai, Amanda Bowhill, Hien Vu, Gordon Russell

Proceedings Volume 9984, 99840D (2016) https://doi.org/10.1117/12.2240292

KEYWORDS: Photomasks, Semiconducting wafers, Reticles, Data conversion, Acquisition tracking and pointing, Neodymium, Radon, Databases, Visualization, Etching

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Proceedings Article | 9 July 2015 Paper

Strategy optimization for mask rule check in wafer fab

Chuen Huei Yang, Shaina Lin, Roger Lin, Alice Wang, Rachel Lee, Erwin Deng

Proceedings Volume 9658, 96580Y (2015) https://doi.org/10.1117/12.2192951

KEYWORDS: Photomasks, Semiconducting wafers, Optical proximity correction, Optical lithography, Inspection, Double patterning technology, Distortion, Silicon, Communication engineering, Etching

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Proceedings Article | 28 June 2013 Paper

Quality enhancement of parallel MDP flows with mask suppliers

Erwin Deng, Rachel Lee, Chun Der Lee

Proceedings Volume 8701, 87010L (2013) https://doi.org/10.1117/12.2028297

KEYWORDS: Photomasks, Statistical modeling, Electronic design automation, Control systems, Data modeling, Failure analysis, Microelectronics, Inspection, Semiconducting wafers

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Proceedings Article | 28 June 2013 Paper

In collaboration with mask suppliers for change management enhancement

Erwin Deng, Chun Der Lee, Rachel Lee

Proceedings Volume 8701, 87010K (2013) https://doi.org/10.1117/12.2028296

KEYWORDS: Photomasks, Quality systems, Control systems, Semiconducting wafers, Document management, Manufacturing, Electronic design automation, Error analysis, Microelectronics, Semiconductor manufacturing

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Proceedings Article | 30 June 2012 Paper

Maskshop data preparation and quality control: from supplier management viewpoint

Erwin Deng, Rachel Lee, Chun Der Lee

Proceedings Volume 8441, 84410T (2012) https://doi.org/10.1117/12.964097

KEYWORDS: Photomasks, Electronic design automation, Semiconducting wafers, Computer aided design, Inspection, Data processing, Error analysis, Semiconductors, Manufacturing, Databases

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Showing 5 of 7 publications

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