Dr. Eugenia D. Eugenieva Profile

Dr. Eugenia D. Eugenieva

at KLA Corp

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Publications (2)

Proceedings Article | 17 October 2008 Paper

Wafer plane inspection evaluated for photomask production

Emily Gallagher, Karen Badger, Mark Lawliss, Yutaka Kodera, Jaione Tirapu Azpiroz, Song Pang, Hongqin Zhang, Eugenia Eugenieva, Chris Clifford, Arosha Goonesekera, Yibin Tian

Proceedings Volume 7122, 71221B (2008) https://doi.org/10.1117/12.801945

KEYWORDS: Photomasks, Inspection, Semiconducting wafers, Finite-difference time-domain method, Wafer inspection, Manufacturing, Printing, Lithography, Reticles, Optical proximity correction

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Proceedings Article | 7 May 1999 Paper

Waveguide and gain properties of active optical layers grown by pulsed laser deposition

E. Eugenieva, Anna Dikovska, Peter Atanasov

Proceedings Volume 3571, (1999) https://doi.org/10.1117/12.347654

KEYWORDS: Waveguides, Wave propagation, Pulsed laser deposition, Geometrical optics, Planar waveguides, Active optics, Light wave propagation, Waveguide lasers, Beam shaping, Sapphire

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