In order to solve the problem of the mutual limitations of large measurement range and high precision of absolute grating encoders, this paper employs absolute codes to individually number each spliced grating section on the substrate, leveraging the asymmetric code arrangement. With the light splitting ability of beam splitter, the light source is divided into dual beams and inputted into the encoder to form a dual beam reading head. At least one beam of light can always generate a stable signal within the travel range, and then the serial number of this grating area is determined through absolute codes. The signals generated by gratings with different numbers can be calibrated using calibration parameters. With the help of the data splicing principle and the structure of dual-beam, a nanoscale positioning accuracy scheme with a meter-level measurement range is proposed.
High-precision position and orientation measurement plays a crucial role in modern engineering and scientific fields, finding applications in areas such as advanced manufacturing, aerospace, and medical technology. Grating encoders are stable and highly accurate position and orientation measurement solutions, particularly well-suited for multi-degree-of-freedom high-precision measurement scenarios.
This paper addresses the modeling and compensation of crosstalk errors resulting from grating angle variations in a previously designed six-degree-of-freedom grating encoder for position and orientation measurement. The six-degree-offreedom grating encoder consists of components such as a light source module, reference and measurement gratings, an angle measurement module, and a displacement measurement module. The deflection of the grating affects the interference signal for displacement measurement. The emitted light beam from the light source undergoes diffraction by the measurement grating, using for measuring three degrees of freedom (angles). The interference between the diffracted light from the measurement grating and the reference grating is detected by the displacement measurement module, using for measuring three degrees of freedom (displacements). The traditional grating displacement measurement does not consider the influence of rotation on the laser phase. This paper innovatively models the influence of rotation on the laser phase, which can compensate the displacement settlement, and the ultra-high precision displacement measurement can be obtained.
Laser processing of micro-via arrays is a critical technology in the electronic packaging industry, essential for the rapid, non-destructive inspection of the geometric shape and depth of blind vias. As chip packaging processes trend towards higher density and miniaturization, the demands on blind via array detection technology are increasing. This paper proposes a fast blind via array inspection method based on dispersive spectroscopy confocal technology. By mounting the probe on a three-axis kinematic stage, auto-focusing is achieved, enabling rapid scanning imaging over a 10 mm × 10 mm area to acquire 3D point cloud data.
We have developed an effective algorithm to filter noise from the 3D point cloud data and align the line scan data, reconstructing accurate geometric profile information of the blind vias with sub-micron inspection accuracy. Tested on copper-clad board blind via arrays, this method quickly and accurately detects the geometric parameters of blind vias, providing a powerful tool for real-time monitoring of blind via processing quality and a novel solution for quality control in electronic packaging, including BGA packaging. The method offers advantages such as fast measurement speed, wide measurement range, and non-destructive, non-contact operation, with broad application prospects in the electronics manufacturing industry. Compared to existing technologies, our proposed measurement method is faster, offers higher resolution, and covers a wider measurement range, meeting the increasing requirements for blind via detection in future chip packaging processes. Furthermore, this technology can be extended to size and morphology inspection in other micro-nano processing fields, offering significant theoretical and practical value.
In modern scientific research and industrial applications, the rapid, automated, and accurate measurement of micro-liquid volumes added to reaction or detection containers is a critical need. Traditional methods for measuring micro-liquid volumes often suffer from insufficient accuracy, low stability, and are prone to interference from bubbles between microliquids and residual droplets in the transmission pipelines. To address these issues, this paper proposes an automated microliquid metering method and system based on machine vision. The system comprises optical imaging units, drive control units, image processing units, metering algorithm units, and calibration units. By optimizing the optical imaging setup, the brightness and contrast of the liquid in the metering field are enhanced, ensuring the accuracy of the volume measurement. Additionally, image processing algorithms are employed to segment the liquid section, and its length in the pixel coordinate system is extracted as a representation of the volume, effectively eliminating the interference from bubbles in the image. Finally, calibration-based measurement methods and direct measurement methods based on homography matrix scale transformation of marker points achieve metering accuracies of 98.2% and 98.3%, respectively. Compared to traditional industrial micro-liquid metering methods, this approach effectively overcomes the impact of bubbles on measurement accuracy while offering greater stability and reliability.
In this work, a solution based on sub-sampling technology for heterodyne signals is proposed. While achieving higher measurement resolution and measurement speed, the performance requirements for the analog-to-digital converter and microprocessor are greatly reduced. The heterodyne signal is a sparse signal with a single frequency at each moment, only its phase offset contains displacement information. We use the pulse counting method to obtain the periods of the signal, and a sampler with a sampling rate well below the frequency of the heterodyne signal. The phase of the sampling point can be restored through sub-sampling technology and extended Kalman filtering. In the experiment, we used 16-bit ADCs with a 600 Ksas sampling rate to sample the heterodyne signals with a center frequency of 10 MHz and the dynamic range from 1 MHz to 19 MHz. The simulation results indicate that our method can effectively calculate the phase information of the interference signal.
The accuracy of the absolute position and orientation of sub-mirrors in large-aperture optical systems significantly impacts system performance. The precision of sub-mirror alignment directly affects the surface shape error of the main mirror, which, in turn, affects imaging quality and overall system performance. Two main methods for position and orientation measurement are electromagnetic displacement measurement and optical displacement measurement. While electromagnetic methods achieve high precision, their complex structures and susceptibility to environmental factors pose challenges. Optical displacement measurement using grating encoders, which rely on grating pitch as a reference, offers high stability and broad applicability.
To address sub-mirror alignment accuracy in large-aperture telescopes, we propose an absolute six-degree-of-freedom grating encoder based on spot position monitoring. This encoder achieves four degrees of freedom (θX, θY, θZ, Z) absolute position and orientation detection using gratings. Additionally, we employ right-angle prisms for absolute position and orientation detection in the X and Y directions, enabling six-degree-of-freedom absolute position and orientation monitoring for sub-mirrors. The monitoring results serve as feedback for sub-mirror pose correction. To mitigate the impact of grating motion on X and Y displacement calculations, we introduce a displacement calculation algorithm based on ray tracing for error compensation, enhancing the accuracy of X and Y displacement calculations and achieving high-precision six-degree-of-freedom measurement and computation.
This paper presents a study on the spot location method and system based on QPDs. We construct a mathematical model of the relationship between spot position variations and detector responses, systematically analyzing the impact of the spot size and detector parameters on spot location accuracy. We propose an ultra-precision Gaussian spot location algorithm based on QPDs, along with a common-path laser light source fluctuation error compensation structure and method, and validated the method through simulation experiments. The experimental results show that this scheme can achieve submicron level spot positioning accuracy. In the measurement range of 1 mm, the measurement error after compensation is reduced by 97% compared to before compensation. Additionally, the repeatability and stability demonstrate excellent performance. This study provides a laser light source fluctuation error compensation method and an ultra-precision Gaussian spot location algorithm based on QPDs for laser measurement technology, significantly improving measurement accuracy and environmental interference resistance.
In order to solve a series of application problems caused by the difficulty of adjusting prism collimation and the short working distance of small period gratings in current collimation solutions, this paper proposes a six-degree-of-freedom measurement scheme that uses a combination of large period gratings and long focus plano-convex lenses. This solution can achieve six degrees of freedom measurement at a working distance of more than 80mm. The main principle is that the displacement is calculated using the phase information formed by the interference of the four diffracted lights of the two-dimensional grating. The angle is based on the principle of autocollimation. According to the propagation direction of the diffracted light caused by the change of the grating diffracted light with the grating angle changes, thereby changing the angle obtained based on the location changes in the detected diffraction spot, ultimately forming a measurement of six degrees of freedom.
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