Mr. Felix Levitov Profile

Felix Levitov

Process Support Engineer Technologist at Applied Materials Inc

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Publications (2)

Proceedings Article | 13 June 2022 Presentation

Resist shrink characterization methodology for more accurate CD metrology

Mary Breton, Karen Petrillo, Jennifer Church, Luciana Meli, Jennifer Fullam, Stuart Sieg, Romain Lallement, Nelson Felix, Shimon Levi, Susan Zollinger, Felix Levitov, Sean Hand, Jason Osborne, Weijie Wang

Proceedings Volume PC12053, PC120530C (2022) https://doi.org/10.1117/12.2614219

KEYWORDS: Critical dimension metrology, Metrology, Scanning electron microscopy, Photoresist materials, Optical proximity correction, Process modeling, Data modeling, Photomasks, Lithography, Extreme ultraviolet lithography

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Proceedings Article | 5 April 2007 Paper

Charging measurement using SEM embedded energy filter

F. Levitov, A. Karabekov, G. Eytan, G. Golan

Proceedings Volume 6518, 65184H (2007) https://doi.org/10.1117/12.711747

KEYWORDS: Semiconducting wafers, Scanning electron microscopy, Optical filters, Electron beams, Image filtering, Electron microscopes, Process control, Sensors, Mirrors, Silicon

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