Dr. Francesco Flora Profile

Dr. Francesco Flora

at ENEA

SPIE Involvement:

Author

Publications (49)

Proceedings Article | 13 April 2020 Presentation + Paper

Accurate and low-cost ENEA solar compass for precision metrology of true azimuth: instrumental and smart versions

S. Bollanti, F. Andreoli, L. Cafarella, D. De Meis, P. Di Lazzaro, D. Di Mauro, F. Flora, G. P. Gallerano, L. Mezi, D. Murra, L. Murra, D. Vicca, G. Vicoli, A. Zirizzotti

Proceedings Volume 11352, 1135216 (2020) https://doi.org/10.1117/12.2555747

KEYWORDS: Sun, Sensors, Magnetism, Global Positioning System, Calibration

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Proceedings Article | 3 January 2019 Paper

The ENEA discharge produced plasma extreme ultraviolet source and its patterning applications

L. Mezi, S. Bollanti, S. Botti, G. Brusatin, L. Businaro, G. Della Giustina, P. Di Lazzaro, M. Fagnoni, F. Flora, A. Gerardino, D. Murra, S. Protti, A. Torre, E. Torti

Proceedings Volume 11042, 110420Z (2019) https://doi.org/10.1117/12.2522469

KEYWORDS: Extreme ultraviolet, Plasma, Graphene, Photomasks, Optical lithography, Extreme ultraviolet lithography, Spatial resolution, Silicon, Photoresist materials, Lithography

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Proceedings Article | 30 January 2013 Paper

Extreme ultraviolet marking system for anti-counterfeiting tags with adjustable security level

P. Di Lazzaro, S. Bollanti, F. Flora, L. Mezi, D. Murra, A. Torre, F. Bonfigli, R. M. Montereali, M. A. Vincenti

Proceedings Volume 8677, 86770T (2013) https://doi.org/10.1117/12.2010400

KEYWORDS: Extreme ultraviolet, Laser induced fluorescence, Extreme ultraviolet lithography, Photomasks, Patents, Microscopes, Luminescence, Transistors, Ultraviolet radiation, Adhesives

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Proceedings Article | 22 April 2009 Paper

A laser-plasma clean soft x-ray source for projection microlithography

S. Bollanti, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra, A. Torre

Proceedings Volume 7131, 713116 (2009) https://doi.org/10.1117/12.816912

KEYWORDS: Mirrors, Extreme ultraviolet, Photomasks, Projection lithography, Plasmas, Projection systems, X-ray sources, Krypton, Laser development, Optical filters

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Proceedings Article | 2 October 2007 Paper

Progress report on a 14.4-nm micro-exposure tool based on a laser-produced-plasma: debris mitigation system results and other issues

S. Bollanti, D. Amodio, A. Conti, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra, A. Torre, C. Zheng, D. Garoli, M. Pelizzo, P. Nicolosi, V. Mattarello, V. Rigato, A. Gerardino

Proceedings Volume 6703, 670308 (2007) https://doi.org/10.1117/12.751442

KEYWORDS: Mirrors, Krypton, Argon, Extreme ultraviolet, Fluctuations and noise, Reflectivity, Plasma, Extreme ultraviolet lithography, Glasses, Copper

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Proceedings Article | 12 June 2007 Paper

Efficient light-emitting microstructures induced by EUV radiation in thermally evaporated lithium fluoride thin films

Rosa Maria Montereali, Salvatore Almaviva, Francesca Bonfigli, Anatoly Faenov, Francesco Flora, Ivano Franzini, Enrico Nichelatti, Tatiana Pikuz, Maria Aurora Vincenti, Giuseppe Baldacchini

Proceedings Volume 6593, 65932B (2007) https://doi.org/10.1117/12.724182

KEYWORDS: Laser induced fluorescence, Crystals, Luminescence, Extreme ultraviolet, Silicon, Thin films, X-rays, Spatial resolution, Silicon films, Confocal microscopy

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Proceedings Article | 2 May 2007 Paper

Status of the SPARX FEL project

C. Vaccarezza, D. Alesini, M. Bellaveglia, S. Bertolucci, M. Biagini, R. Boni, M. Boscolo, M. Castellano, A. Clozza, L. Cultrera, G. Di Pirro, A. Drago, A. Esposito, M. Ferrario, D. Filippetto, V. Fusco, A. Gallo, A. Ghigo, S. Guiducci, M. Migliorati, L. Palumbo, L. Pellegrino, M. Preger, C. Sanelli, M. Serio, F. Sgamma, B. Spataro, A. Stella, F. Tazzioli, M. Vescovi, C. Vicario, F. Ciocci, G. Dattoli, A. Doria, F. Flora, G. Gallerano, L. Giannessi, E. Giovenale, G. Messina, P. Ottaviani, G. Parisi, L. Picardi, M. Quattromini, A. Renieri, C. Ronsivalle, S. Cialdi, C. Maroli, V. Petrillo, M. Romè, L. Serafini, L. Catani, E. Chiadroni, A. Cianchi, C. Schaerf, P. Musumeci, F. Alessandria, A. Bacci, F. Broggi, C. De Martinis, D. Giove, M. Mauri, L. Ficcadenti, M. Mattioli, A. Mostacci, P. Emma, S. Reiche, J. Rosenzweig

Proceedings Volume 6634, 66341D (2007) https://doi.org/10.1117/12.742069

KEYWORDS: Magnetism, Free electron lasers, Electron beams, Particles, Stanford Linear Collider, Superconductors, Diagnostics, S band, Lanthanum, Energy efficiency

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Proceedings Article | 26 April 2007 Paper

Excimer-laser-driven EUV plasma source for one-shot one-pattern projection microlithography

P. Di Lazzaro, G. Altieri, D. Amodio, S. Bollanti, A. Conti, F. Flora, T. Letardi, L. Mezi, D. Murra, E. Tefouet Kana, A. Torre, C. E. Zheng

Proceedings Volume 6346, 63460M (2007) https://doi.org/10.1117/12.738084

KEYWORDS: Extreme ultraviolet, Plasma, Mirrors, Extreme ultraviolet lithography, Databases, Excimer lasers, X-rays, Pulsed laser operation, Photoresist materials, Prototyping

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Proceedings Article | 7 December 2006 Paper

SPARC/X Projects

D. Alesini, S. Bertolucci, M. Biagini, R. Boni, M. Boscolo, M. Castellano, A. Clozza, G. Di Pirro, A. Drago, A. Esposito, M. Ferrario, V. Fusco, A. Gallo, A. Ghigo, S. Guiducci, M. Incurvati, C. Ligi, F. Marcellini, M. Migliorati, A. Mostacci, L. Palumbo, L. Pellegrino, M. Preger, R. Ricci, C. Sanelli, M. Serio, F. Sgamma, B. Spataro, A. Stecchi, A. Stella, F. Tazzioli, C. Vaccarezza, M. Vescovi, C. Vicario, F. Alessandria, A. Bacci, I. Boscolo, F. Broggi, S. Cialdi, C. De Martinis, D. Giove, C. Maroli, V. Petrillo, M. Romè, L. Serafini, D. Levi, G. Medici, M. Mattioli, P. Musumeci, L. Catani, E. Chiadroni, D. Moricciani, F. Ciocci, G. Dattoli, A. Doria, F. Flora, G. Gallerano, L. Giannessi, E. Giovenale, G. Messina, L. Mezi, P. Ottaviani, L. Picardi, M. Quattromini, A. Renieri, C. Ronsivalle, A. Cianchi, C. Schaerf, J. Rosenzweig

Proceedings Volume 5974, 59740K (2006) https://doi.org/10.1117/12.640290

KEYWORDS: Free electron lasers, Magnetism, Pulsed laser operation, Electron beams, X-rays, Picosecond phenomena, X-ray sources, Visible radiation, S band, Modulation

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Proceedings Article | 15 October 2005 Paper

Mask tilt effects counteracted by wafer tilts in a Schwarzschild objective based EUV lithography setup

S. Bollanti, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra, A. Torre

Proceedings Volume 5962, 59622Y (2005) https://doi.org/10.1117/12.624845

KEYWORDS: Photomasks, Semiconducting wafers, Extreme ultraviolet lithography, Mirrors, Wafer-level optics, Zemax, Solids, Extreme ultraviolet, Image resolution, Microscopes

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Proceedings Article | 12 October 2005 Paper

Recent results of laser-driven EUV and soft x-rays plasma source at ENEA Frascati

P. Di Lazzaro, S. Bollanti, A. Conti, F. Flora, L. Mezi, D. Murra, C. Zheng

Proceedings Volume 5958, 595814 (2005) https://doi.org/10.1117/12.621079

KEYWORDS: Plasma, Krypton, Extreme ultraviolet, Tantalum, Pulsed laser operation, Copper, Ions, X-rays, Excimer lasers, Solids

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Proceedings Article | 18 August 2004 Paper

Refractive index change in photoluminescent patterns based on color centers generated in lithium fluoride by EUV radiation

Rosa Maria Montereali, Francesca Bonfigli, Anatoly Faenov, Francesco Flora, Tiziana Marolo, Marco Montecchi, Enrico Nichelatti, Tatiana Pikuz, Giuseppe Baldacchini

Proceedings Volume 5451, (2004) https://doi.org/10.1117/12.545643

KEYWORDS: Laser induced fluorescence, Crystals, Refractive index, Extreme ultraviolet, X-rays, Luminescence, Absorption, Color centers, Spatial resolution, Lithium

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Proceedings Article | 7 January 2004 Paper

Highly efficient x-ray imaging and backlighting schemes based on spherically bent crystals

Tatiana Pikuz, Anatoly Faenov, Igor Skobelev, Alexandr Magunov, Manuel Sanchez del Rio, Lucia Alianelli, Giuseppe Baldacchini, Francesco Flora, Sarra Bollanti, Paulo Di Lazzaro, Daniele Murra, Giuseppe Tomassetti, Antonio Ritucci, Armando Reale, Lucia Reale, Massimo Francucci, Sergio Martellucci, Giovanni Petrocelli

Proceedings Volume 5196, (2004) https://doi.org/10.1117/12.503580

KEYWORDS: Crystals, Plasma, Spatial resolution, X-ray imaging, X-rays, Sensors, Monochromatic aberrations, Spherical lenses, Mica, Magnesium

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Proceedings Article | 7 January 2004 Paper

Lithium fluoride coloration by laser-plasma soft x-rays: a promising tool for x-ray microscopy and photonics

Francesco Flora, Giuseppe Baldacchini, Francesca Bonfigli, Antonella Lai, Tiziana Marolo, Luca Mezi, Rosa Maria Montereali, Daniele Murra, Nicola Lisi, Enrico Nichelatti, Anatoly Faenov, Tatiana Pikuz, Libero Palladino, Armando Reale, Antonio Ritucci, Lucia Reale, Giuseppe Tomassetti, Pasquale Fabi, Tania Limongi

Proceedings Volume 5196, (2004) https://doi.org/10.1117/12.505782

KEYWORDS: Laser induced fluorescence, Fluorine, Lithium, X-rays, Crystals, X-ray microscopy, Extreme ultraviolet, Luminescence, X-ray lasers, Sensors

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Proceedings Article | 19 December 2003 Paper

Far-field, near-field, and interference patterns imaging in LiF crystals from a 46.9-nm capillary-discharge-pumped soft x-ray laser

Giuseppe Tomassetti, Antonio Ritucci, Armando Reale, Lucia Reale, Libero Palladino, Anatoly Faenov, Tatiana Pikuz, Francesco Flora, Luca Mezi, Giuseppe Baldacchini, Rosamaria Montereali, Francesca Bonfigli, L. Arrizza, Sergei Kukhlevsky, J. Kaiser

Proceedings Volume 5197, (2003) https://doi.org/10.1117/12.508063

KEYWORDS: Laser induced fluorescence, Capillaries, Plasma, Sensors, Pulsed laser operation, Diffraction, X-rays, X-ray lasers, Spatial resolution, Laser energy

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Proceedings Article | 10 November 2003 Paper

Optical emitters based on color centers in lithium fluoride exposed by soft x-ray radiation

Francesca Bonfigli, Anatoly Faenov, Francesco Flora, Tiziana Marolo, Rosa Maria Montereali, Enrico Nichelatti, Tatiana Pikuz, Giuseppe Baldacchini

Proceedings Volume 5181, (2003) https://doi.org/10.1117/12.502707

KEYWORDS: Laser induced fluorescence, X-rays, Crystals, Spatial resolution, Extreme ultraviolet, Luminescence, Color centers, Absorption, Lithium, Lithography

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Proceedings Article | 9 April 2003 Paper

High-resolution and high-efficiency coloration of lithium fluoride by soft x-ray irradiation

Giuseppe Baldacchini, Francesca Bonfigli, Francesco Flora, Rosamaria Montereali, Daniele Murra, Nicola Lisi, Enrico Nichelatti, Tatiana Pikuz, Anatoly Faenov, Tania Limongi, Libero Palladino, Lucia Reale

Proceedings Volume 5131, (2003) https://doi.org/10.1117/12.513681

KEYWORDS: Laser induced fluorescence, X-rays, Extreme ultraviolet, Crystals, X-ray microscopy, X-ray imaging, Polymethylmethacrylate, X-ray detectors, Sensors, Plasma

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Proceedings Article | 12 December 2001 Paper

Effect of transverse electrical fields on x-ray amplification in a capillary-discharge Z-pinch

Sergei Kukhlevsky, Jozef Kaiser, Giuseppe Tomassetti, Antonio Ritucci, Armando Reale, Libero Palladino, Francesco Flora, Luca Mezi, Ida Kozma

Proceedings Volume 4505, (2001) https://doi.org/10.1117/12.450602

KEYWORDS: Plasma, Capillaries, X-rays, Argon, Dielectrics, Magnetism, Ions, Data modeling, Autoregressive models, X-ray lasers

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Proceedings Article | 14 November 2001 Paper

Krypton as filter for ions, debris, and useless radiation in EUV projection lithography systems

Francesco Flora, Luca Mezi, Sarah Bollanti, Francesca Bonfigli, Paolo Di Lazzaro, Tommaso Letardi, Cheng En Zheng

Proceedings Volume 4504, (2001) https://doi.org/10.1117/12.448452

KEYWORDS: Krypton, Ions, Extreme ultraviolet, Tantalum, Copper, Mirrors, Plasmas, Glasses, Clouds, Helium

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Proceedings Article | 14 November 2001 Paper

Fast collisional capillary discharge source for soft x-ray production and applications

Giuseppe Tomassetti, Libero Palladino, Antonio Ritucci, Lucia Reale, Tania Limongi, Sergei Kukhlevsky, Jozef Kaiser, Francesco Flora, Luca Mezi

Proceedings Volume 4504, (2001) https://doi.org/10.1117/12.448460

KEYWORDS: Capillaries, X-rays, Plasma, Argon, X-ray sources, PIN photodiodes, Spectroscopy, Aluminum, X-ray microscopy, Capacitors

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Proceedings Article | 14 November 2001 Paper

Novel portable high-luminosity monochromatically tunable x-ray microscope

Francesco Flora, Sarah Bollanti, A. Lai, Paolo Di Lazzaro, Tommaso Letardi, Antonio Grilli, Libero Palladino, Giuseppe Tomassetti, Armando Reale, Lucia Reale, Anna Scafati, L. Baccehtta, Lucia Alianelli, Manuel Sanchez del Rio, Tatiana Pikuz, Anatoly Faenov

Proceedings Volume 4504, (2001) https://doi.org/10.1117/12.448472

KEYWORDS: Crystals, X-rays, Spatial resolution, Microscopes, X-ray sources, Sensors, X-ray imaging, Plasmas, Laser crystals, Ray tracing

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Proceedings Article | 25 January 2001 Paper

Amorphous silicon crystallization by a long-pulse excimer laser

Paolo Di Lazzaro, Sarah Bollanti, Francesca Bonfigli, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, Daniele Murra, Cheng En Zheng, Alessandro Baldesi

Proceedings Volume 4184, (2001) https://doi.org/10.1117/12.413991

KEYWORDS: Amorphous silicon, Excimer lasers, Crystals, Laser crystals, Annealing, Silicon, Laser energy, Zoom lenses, Glasses, X-rays

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Proceedings Article | 8 June 2000 Paper

Wave-optics treatment of x rays passing through straight and tapered capillaries

Sergei Kukhlevsky, Francesco Flora, Alessandro Marinai, Gergely Nyitray, Zs. Kozma, Antonio Ritucci, Libero Palladino, Armando Reale, Giuseppe Tomassetti

Proceedings Volume 4155, (2000) https://doi.org/10.1117/12.387880

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Proceedings Article | 3 April 2000 Paper

Beam quality of a XeCl excimer laser vs. the repetition rate

Paolo Di Lazzaro, Sarah Bollanti, Francesca Bonfigli, Francesco Flora, Tommaso Letardi, Daniele Murra

Proceedings Volume 3889, (2000) https://doi.org/10.1117/12.380907

KEYWORDS: Pulsed laser operation, Near field, Excimer lasers, Mirrors, Resonators, Laser energy, Oscillators, Ultraviolet radiation, Laser beam diagnostics, Laser resonators

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Proceedings Article | 7 February 2000 Paper

Industrial large-aperture XeCl laser for surface processing

Tommaso Letardi, Alessandro Baldesi, Sarah Bollanti, Francesca Bonfigli, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Alessandro Marinai, Daniele Murra, Giovanni Schina, Cheng En Zheng

Proceedings Volume 3888, (2000) https://doi.org/10.1117/12.377068

KEYWORDS: X-rays, Silicon, Diodes, Semiconductor lasers, Amorphous silicon, Laser sources, Pulsed laser operation, Copper, Capacitors, Gas lasers

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Proceedings Article | 23 November 1999 Paper

Toward a high-average-power and debris-free soft x-ray source for microlithography pumped by a long-pulse excimer laser

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Tommaso Letardi, Alessandro Marinai, Alessandro Nottola, Kostandia Vigli-Papadaki, A. Vitali, Francesca Bonfigli, Nicola Lisi, Libero Palladino, Armando Reale, Cheng En Zheng

Proceedings Volume 3767, (1999) https://doi.org/10.1117/12.371128

KEYWORDS: X-rays, Plasma, Pulsed laser operation, Tantalum, Excimer lasers, CCD cameras, Ions, Copper, Mirrors, Solids

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Proceedings Article | 23 November 1999 Paper

Large-field high-resolution x-ray monochromatic microscope based on spherical crystals and high-repetition-rate laser-produced plasmas

Tatiana Pikuz, Anatoly Faenov, Moshe Fraenkel, Arie Zigler, Francesco Flora, Sarah Bollanti, Paolo Di Lazzaro, Tommaso Letardi, Antonio Grilli, Libero Palladino, Giuseppe Tomassetti, Armando Reale, Lucia Reale, Anna Scafati, Tania Limongi, Francesca Bonfigli

Proceedings Volume 3767, (1999) https://doi.org/10.1117/12.371143

KEYWORDS: Crystals, X-rays, Microscopes, Plasmas, X-ray sources, Laser crystals, Spatial resolution, X-ray imaging, X-ray optics, Mica

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Proceedings Article | 29 September 1999 Paper

Diffraction of x rays in capillary waveguides

Sergei Kukhlevsky, Ida Kozma, Francesco Flora, Alessandro Marinai, Libero Palladino, Armando Reale, Giuseppe Tomassetti, Antonio Ritucci

Proceedings Volume 3766, (1999) https://doi.org/10.1117/12.363658

KEYWORDS: Diffraction, X-rays, Capillaries, Waveguides, Wave propagation, X-ray diffraction, X-ray optics, X-ray sources, X-ray characterization, Reflectivity

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Proceedings Article | 30 December 1998 Paper

Soft x-ray plasma source pumped by an excimer laser: optimization and applications

Patrizia Albertano, Mauro Belli, Sarah Bollanti, Paolo Di Lazzaro, Anatoly Faenov, Francesco Flora, Gualtiero Giordano, Antonio Grilli, Fiorenza Ianzini, Sergei Kukhlevsky, Tommaso Letardi, Alessandro Marinai, Alessandro Nottola, Libero Palladino, Tatiana Pikuz, Armando Reale, Lucia Reale, Anna Scafati, Giovanni Schina, Maria Tabocchini, I. C. Edmond Turcu, Kostandia Vigli-Papadaki

Proceedings Volume 3683, (1998) https://doi.org/10.1117/12.334808

KEYWORDS: X-rays, Plasma, X-ray microscopy, X-ray sources, Pulsed laser operation, Helium, Copper, Excimer lasers, Aluminum, Atmospheric plasma

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Proceedings Article | 22 December 1998 Paper

X-ray diode with spark plug plasma cathodes

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, Daniele Murra, Giovanni Schina, Cheng En Zheng

Proceedings Volume 3574, (1998) https://doi.org/10.1117/12.334409

KEYWORDS: Diodes, X-rays, Plasma, Surface plasmons, Capacitors, Astatine, Ionization, Electrodes, Gas lasers, Excimer lasers

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Proceedings Article | 14 July 1998 Paper

Measurement of the time-resolved divergence of pulsed laser beams

Paolo Di Lazzaro, Francesco Flora, Nicola Lisi

Proceedings Volume 3423, (1998) https://doi.org/10.1117/12.316572

KEYWORDS: Pulsed laser operation, Excimer lasers, Resonators, Photodetectors, Laser resonators, Laser-matter interactions, Laser processing, Sensors, Photodiodes, Near field

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Proceedings Article | 14 July 1998 Paper

Applications of an x-ray plasma source driven by an excimer laser: in vivo microscopy, microradiography, and radiobiology

Sarah Bollanti, Robin Cotton, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Giovanni Schina, Tommaso Letardi, Nicola Lisi, Alessandro Nottola, Kostandia Vigli-Papadaki, Armando Reale, Libero Palladino, Lucia Reale, Mauro Belli, Fiorenza Ianzini, M. Tobocchini, Anna Scafati, Anatoly Faenov, Tatiana Pikuz, Patrizia Albertano

Proceedings Volume 3423, (1998) https://doi.org/10.1117/12.316625

KEYWORDS: X-rays, X-ray microscopy, Plasma, X-ray sources, Microscopy, Excimer lasers, Helium, Atmospheric plasma, Copper, Pulsed laser operation

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Proceedings Article | 1 November 1997 Paper

Double-pulse excitation of x-ray capillary lasers

Sergei Kukhlevsky, Ida Kozma, Libero Palladino, Armando Reale, Francesco Flora, Luca Mezi, Gualtiero Giordano

Proceedings Volume 3156, (1997) https://doi.org/10.1117/12.284824

KEYWORDS: Plasmas, Electrons, Ionization, Tellurium, Capillaries, Ions, Pulsed laser operation, X-rays, X-ray lasers, Neon

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Proceedings Article | 1 November 1997 Paper

Generation of high-density metal-vapor columns for x-ray capillary lasers

Sergei Kukhlevsky, Ida Kozma, Libero Palladino, Armando Reale, Francesco Flora, Gualtiero Giordano

Proceedings Volume 3156, (1997) https://doi.org/10.1117/12.284823

KEYWORDS: Capillaries, Plasmas, Electrodes, Metals, Dielectrics, X-ray lasers, X-rays, Explosives, Diffusion, Skin

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Proceedings Article | 14 October 1997 Paper

Atmospheric-pressure soft x-ray source for contact microscopy and radiobiology applications

Patrizia Albertano, Mauro Belli, Paolo Di Lazzaro, Anatoly Faenov, Francesco Flora, Antonio Grilli, Fiorenza Ianzini, Tommaso Letardi, Alessandro Nottola, Libero Palladino, Tatiana Pikuz, Armando Reale, Lucia Reale, Anna Scafati, Maria Tabocchini, I. C. Edmond Turcu, Kostandia Vigli-Papadaki

Proceedings Volume 3157, (1997) https://doi.org/10.1117/12.279418

KEYWORDS: X-rays, Plasma, X-ray sources, Pulsed laser operation, Helium, X-ray microscopy, Microscopy, Atmospheric plasma, Copper, Excimer lasers

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Proceedings Article | 14 October 1997 Paper

Contact x-ray microscopy using Asterix

Aldo Conti, Dimitri Batani, Cesare Botto, Alessandra Masini, A. Bernardinello, Fulvia Bortolotto, M. Moret, G. Poletti, S. Piccoli, F. Cotelli, C. Lora Lamia Donin, Anthony Stead, A. Marranca, Klaus Eidmann, Francesco Flora, Libero Palladino, Lucia Reale

Proceedings Volume 3157, (1997) https://doi.org/10.1117/12.279419

KEYWORDS: X-rays, Photoresist materials, X-ray microscopy, Yeast, Diagnostics, Streak cameras, X-ray imaging, Gold, Molybdenum, Cameras

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Proceedings Article | 4 April 1997 Paper

Comparison of beam quality parameters of two high-peak power eximer laser beams

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, Giovanni Schina, Daniele Murra, C. Petrucci, Olivier Uteza, Cheng En Zheng

Proceedings Volume 3092, (1997) https://doi.org/10.1117/12.270259

KEYWORDS: Excimer lasers, Optical testing, Laser systems engineering, Resonators, Near field, Fourier transforms, Solids, Laser resonators, Pulsed laser operation, Confocal microscopy

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Proceedings Article | 26 August 1996 Paper

Near-diffraction-limited excimer laser beam from a XeCl POPA system

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, Daniele Murra, C. Petrucci, Giovanni Schina, Olivier Uteza, Cheng En Zheng

Proceedings Volume 2788, (1996) https://doi.org/10.1117/12.248600

KEYWORDS: Oscillators, Diffraction, Near field, Excimer lasers, Resonators, Mirrors, Optical testing, Optical amplifiers, Gas lasers, Beam shaping

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Proceedings Article | 18 September 1995 Paper

Characteristics of a soft x-ray plasma source for different pumping laser configurations and spectral analysis

Sarah Bollanti, Robin Cotton, Paolo Di Lazzaro, Francesco Flora, Tommaso Letardi, Nicola Lisi, Dimitri Batani, Aldo Conti, A. Mauri, Libero Palladino, Armando Reale, Anatoly Faenov, Tatiana Pikuz, Albert Osterheld

Proceedings Volume 2523, (1995) https://doi.org/10.1117/12.220998

KEYWORDS: X-rays, Pulsed laser operation, Plasma, Copper, X-ray sources, Excimer lasers, Solids, Optical amplifiers, Photons, X-ray microscopy

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Proceedings Article | 18 September 1995 Paper

X-ray contact microscopy using a plasma source generated by long and short (120-ns and 10-ns) excimer laser pulses

Robin Cotton, Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Nicola Lisi, Tommaso Letardi, Libero Palladino, Armando Reale, Dimitri Batani, Aldo Conti, A. Mauri, M. Moret, Lucia Reale, Patrizia Albertano, Antonio Grilli

Proceedings Volume 2523, (1995) https://doi.org/10.1117/12.220977

KEYWORDS: X-rays, X-ray imaging, X-ray microscopy, Microscopy, Plasma, Photoresist developing, Image resolution, Pulsed laser operation, Copper, Atomic force microscopy

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Proceedings Article | 16 August 1994 Paper

New technique for discharge electrodes design including asymmetric geometries

Luca Mezi, Francesco Flora

Proceedings Volume 2206, (1994) https://doi.org/10.1117/12.184602

KEYWORDS: Electrodes, Head, Excimer lasers, Optical simulations, Chemical elements, Gas lasers, Energy efficiency, Pollution, Inductance, Lasers

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Proceedings Article | 16 August 1994 Paper

Compact three-electrodes excimer laser IANUS for a POPA optical system

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, C. Petrucci, Giovanni Schina, Cheng En Zheng

Proceedings Volume 2206, (1994) https://doi.org/10.1117/12.184577

KEYWORDS: Electrodes, Mirrors, Pulsed laser operation, Resonators, Oscillators, Near field, Diffraction, Solids, Excimer lasers, Gas lasers

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Proceedings Article | 4 May 1993 Paper

High-brightness excimer laser source applied in soft x-ray generation

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, M. Portaccio, Giovanni Schina, Cheng En Zheng, Libero Palladino, Armando Reale, G. Taglieri, Dimitri Batani, Mauro Belli, Anna Scafati

Proceedings Volume 1810, (1993) https://doi.org/10.1117/12.144571

KEYWORDS: X-rays, Aluminum, Plasma, Optical filters, PIN photodiodes, Resonators, Mirrors, Pulsed laser operation, Excimer lasers, Laser energy

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Proceedings Article | 4 May 1993 Paper

Self-injected XeCl excimer laser

Paolo Di Lazzaro, Francesco Flora, A. Gerardino, Tommaso Letardi

Proceedings Volume 1810, (1993) https://doi.org/10.1117/12.144687

KEYWORDS: Pulsed laser operation, Excimer lasers, Tunable lasers, Modulation, Chemical lasers, Laser stabilization, Polarization, Mirrors, X-ray lasers, X-rays

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Proceedings Article | 4 May 1993 Paper

Excimer laser development and applications at the ENEA Frascati Centre

Tommaso Letardi, Sarah Bollanti, Paolo Di Lazzaro, Honglie Fang, Francesco Flora, Shufen Fu, A. Gerardino, Gualtiero Giordano, Nicola Lisi, Luca Mezi, Giovanni Schina, Amalia Torre, Cheng En Zheng

Proceedings Volume 1810, (1993) https://doi.org/10.1117/12.144661

KEYWORDS: X-rays, Laser development, Excimer lasers, Electrodes, Pulsed laser operation, Chemical lasers, Diodes, Switching, Excimers, Lasers

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Proceedings Article | 4 May 1993 Paper

Diffraction numerical simulation of a high-power excimer laser performance

Francesco Flora, M. Portaccio, Amalia Torre

Proceedings Volume 1810, (1993) https://doi.org/10.1117/12.144679

KEYWORDS: Resonators, Wave propagation, Numerical simulations, Excimer lasers, High power lasers, Aluminum, Diffraction, Laser resonators, Laser development, Mirrors

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Proceedings Article | 1 September 1991 Paper

Excimer laser development at the ENEA Frascati Centre: discharge instabilities study

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Shufen Fu, Gualtiero Giordano, Tommaso Letardi, Nicola Lisi, Giovanni Schina, Cheng En Zheng

Proceedings Volume 1503, (1991) https://doi.org/10.1117/12.46917

KEYWORDS: Excimer lasers, Pulsed laser operation, Xenon, Laser development, X-rays, Prototyping, Human-computer interaction, Laser beam diagnostics, High power lasers, Light sources

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Proceedings Article | 1 February 1991 Paper

Large volume XeCl laser with longitudinal gas flow: experimental results and theoretical analysis

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, Gualtiero Giordano, Tommaso Letardi, Nicola Lisi, Giovanni Schina, Cheng En Zheng

Proceedings Volume 1397, (1991) https://doi.org/10.1117/12.25971

KEYWORDS: Gas lasers, Pulsed laser operation, Xenon, X-rays, Chemical lasers, Electrodes, Aluminum, X-ray optics, Laser stabilization, Laser beam diagnostics

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Proceedings Article | 1 August 1990 Paper

Operation of a 10-L discharge XeCl laser

Sarah Bollanti, Paolo Di Lazzaro, Francesco Flora, A. Gerardino, Gualtiero Giordano, Tommaso Letardi, Nicola Lisi, Giovanni Schina, Cheng En Zheng

Proceedings Volume 1278, (1990) https://doi.org/10.1117/12.20599

KEYWORDS: X-rays, Excimer lasers, Diodes, Pulsed laser operation, Electrons, X-ray optics, X-ray lasers, Gas lasers, Electrodes, Laser energy

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Showing 5 of 49 publications

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