Ms. Fuki Sato Profile

Fuki Sato

at Ushio Inc

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Publications (1)

Proceedings Article | 13 November 2024 Poster

LDP EUV source performance and cost-of-ownership improvement

Yusuke Teramoto, Shunichi Morimoto, Teruaki Kawajiri, Koji Suzuki, Fuki Sato, Akihisa Nagano, Noritaka Ashizawa, Hidenori Watanabe, Kazuya Aoki, Yoshihiko Sato

Proceedings Volume PC13215, PC1321514 (2024) https://doi.org/10.1117/12.3036726

KEYWORDS: Extreme ultraviolet, Tunable filters, Plasma, Inspection, Extreme ultraviolet lithography, Tin, Reliability, Pulsed laser operation, Ions, EUV optics

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