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Gabriel Kerner
at Hebrew Univ.of Jerusalem
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Author
Publications (1)
Proceedings Article | 14 October 2004 Paper
Physisorbed buffer layer as a template for pulsed laser patterning of metallic thin films: an alternative approach for photolithography
Proceedings Volume 5513, (2004) https://doi.org/10.1117/12.557621
KEYWORDS: Optical lithography, Pulsed laser operation, Xenon, Metals, Potassium, Gold, Lithography, Laser ablation, Thin films, Carbon monoxide
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