Nano-CT provides a brand new tool for the research of biology, life sciences, archeology and artifacts, and new materials for its excellent nondestructive detecting capability, especially in the non-destructive testing of carbon and hydrogen polymer light element materials. However, typical conventional Nano-CT cannot perform high-resolution and contrast imaging on structure of materials with small differences in X-ray absorption, and the traditional color CT which can achieve this function has low ray intensity and poor image quality when observed on light-element materials. Therefore, a true-color Nano-CT based on FEI Quanta 600 SEM is proposed in this paper. Three different material targets, Cr, Cu, and W, are introduced to obtain different energy rays. High-sensitivity CCD detector and single-circle scanning method are used to acquire projection data and reconstruct three CT images with different energies. Finally, principal component analysis (PCA) algorithm is used to extract the three principal components as color and the three primary colors of the image are combined to form a true-color image. The true-color Nano-CT can perform high-resolution imaging of substances with similar attenuation coefficients but different compositions with high resolution.
The Micro-CT uses X-ray to detect the internal structure of a sample on micro&nano scale without destroying it, the main challenges in manufacturing a high power Micro-CT is a target with fast heat dissipation to produce high power intensity of X-ray. In this manuscript, we introduce our progress in manufacturing a target that can withstand higher power of electron beam than previous. Firstly, Monte-Carlo simulation (Genat4) is constructed to determine the optimal thickness of the tungsten film, which optimize the intensity of X-ray. In addition, we examine heat dissipation of tungsten and aluminum by finite element method and find that diamond is the most suitable material for substrate, because it results in the lowest temperature near the impact point according to our simulation. Thirdly, the magnetron sputtering method is used to fabricate a tungsten film on the diamond substrate. We highlight that the Micro-CT based on this target achieve a high resolution of 3μm, and the power of electron beam is 10 watts. Based on these improvements, the experiments show that our tungsten-diamond target provides much better performance with quicker heat dissipation rate (i.e. with lower temperature near the impact point) and the stronger power of X-ray than previous works.
X-ray Nano-Computed Tomography (Nano-CT) is widely used in micro device nondestructive testing, material science, life science and other applications fields. Micro-focus X-ray source is one of the key components of Nano-CT and is directly affected by the quality of electron beam. Diameter is the key performance index of electron beam. The detection of electron beam spot diameter is of great significance for monitoring the performance of Nano-CT and quantitatively evaluating the qualities of design and fabrication of the electron gun and electron optical system. In this paper, the diameter direct detecting method is presented and applied to the FEI Quanta 600 SEM. The relationship between electron beam diameter and detecting curve is analyzed at first, then the application feature of diameter detecting methods, including crosshair detecting method, slit detecting method and single edge detecting method, is researched and compared. Furthermore, the experimental results demonstrate that the edge detection has higher detecting accuracy and lower requirement on the sampler, and that after computation the detecting error is within 20 nm.
X-ray MicroandNano imaging is developed based on the conventional x–ray tomography, it can not only provide nondestructive testing with higher resolution measurement, but also be used to examine the material or the structure with low atomic number and low density. The source with micro-focal spot size is one of the key components of x-ray MicroandNano imaging. The focused electron beam from SEM bombarding the metal target can generate x-ray with ultra-small size. It is convenient to set up x-ray microscopy based on SEM for laboratory use. This paper describes a new x-ray microscopy using reflection targets based on FEI Quanta600 SEM with tungsten filament. The flat panel detector is placed outside of the vacuum chamber with 300μm thickness Be-window to isolate vacuum from the air. A stage with 3 DOFs is added to adjust the positions of the target, the SEM’s sample stage is used to move sample. And the shape of target is designed as cone with 60° half cone angle to get the maximum x-ray dosage. The attenuation coefficient of Bewindow for x-ray is about 25%. Finally, the line pair card is used to evaluate the resolution and the result shows that the resolution of the system can receive less than 750nm, when the acceleration voltage is 30keV, the beam current is 160nA, the SEM working distance is 5mm and the acquisition time of the detector is 60s.
A microfocus electron-impact X-ray source with micro-beam was introduced in this paper. The tungsten cathode electrogun is used as emitting system, and the focusing system is consists of two magnetic solenoid lenses, it is effective, light and handy. The matching problems between emitting system focusing system are studied on the microfocus X-ray source. The current of the first focusing lens and the second focusing lens is 0.8A and 1.64A at the voltage of 90kV respectively, and the filament current is 2.5A. Under the condition, the micro-beam spot X-ray is gained. The test results of stability showed that the X-ray source have a excellent stability, X-ray intensity of which is 110.6±0.03μSr/hr, target current of which is 185.5±1.5μA, and the target temperature of which is 96.5±0.5°C.The resolution of micro-focus X-ray source is about 4μm by the analysis of JIMA, which meet the application requirement of microfocus X-ray source.
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