Dr. Graciela R. Guel Profile

Dr. Graciela R. Guel

Process Engineer at Intel Corp

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Publications (4)

Proceedings Article | 8 December 1995 Paper

24"x 20" precision photomasks manufacture

Graciela Guel, Martin Boothman, Daniel Rector, Susan Wilson

Proceedings Volume 2621, (1995) https://doi.org/10.1117/12.228177

KEYWORDS: Photomasks, Inspection, Manufacturing, Lithography, Glasses, Metrology, Printing, Reticles, Quartz, Light scattering

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Proceedings Article | 1 April 1994 Paper

Very large precision mask manufacturing: an innovative approach

Graciela Guel

Proceedings Volume 2174, (1994) https://doi.org/10.1117/12.172150

KEYWORDS: Inspection, Manufacturing, Photomasks, Lithography, YAG lasers, Calibration, Metals, Reticles, Microscopes, Flat panel displays

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Proceedings Article | 26 June 1992 Paper

Deep traps at MOCVD GaAs and regrown AlxGa1-xAs interfaces

Graciela Guel, Kevin Malloy, Christian Schaus, Michael Sun, Eric Armour, Kang Zheng, T. Shiau

Proceedings Volume 1634, (1992) https://doi.org/10.1117/12.59158

KEYWORDS: Interfaces, Gallium arsenide, Sulfur, Etching, Metalorganic chemical vapor deposition, Wet etching, Semiconductor lasers, Heat treatments, Oxygen, Technologies and applications

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Proceedings Article | 26 June 1992 Paper

Composition dependence of the dry etching of MOCVD-grown AlxGa1-xAs

Graciela Guel, Christian Schaus, Kevin Malloy

Proceedings Volume 1634, (1992) https://doi.org/10.1117/12.59175

KEYWORDS: Ions, Aluminum, Etching, Dry etching, Gallium arsenide, Photoresist materials, Metalorganic chemical vapor deposition, Argon, Semiconductors, Semiconductor lasers

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