A 33×33 thermo-optic tunable arrayed waveguide grating (AWG) is fabricated using the poly (2,3,4,5,6-pentafluorostyrene-co-glycidylmethacrylate) (PFS-co-GMA). The fabrication process of the device is depicted, and the measured results are presented. The measured insertion loss is between 8.5 dB for the central channel and 10 dB for the edge channels, the crosstalk is below −20 dB, the wavelength channel spacing is 0.8 nm, and the 3-dB bandwidth is 0.35 nm. The measured wavelength/temperature shift rate is about −0.12 nm/K. The central wavelength is 1545.21 to 1551.81 nm in the temperature range from 10 to 65°C. The tuning range is −6.6 nm.
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