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Han Xu
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Publications (1)
Proceedings Article | 20 June 2021 Presentation
Characterization of the optical aberrations of a metrological UV microscope
Jan Krüger, Bernd Bodermann, Rainer Köning, Wolfgang Haessler-Grohne, Han Xu
Proceedings Volume 11783, 117830F (2021) https://doi.org/10.1117/12.2592566
KEYWORDS: Optical aberrations, Microscopes, Metrology, Ultraviolet radiation, Optical components, Imaging systems, Image processing, Zernike polynomials, Visibility, Quantitative analysis
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