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Haruki Iguchi
at Univ of Hyogo
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Publications (1)
Proceedings Article | 9 July 2015 Paper
Development of a reflectometer for a large EUV mirror in NewSUBARU
Proceedings Volume 9658, 965819 (2015) https://doi.org/10.1117/12.2199014
KEYWORDS: Reflectometry, Mirrors, Extreme ultraviolet, Reflectivity, Photomasks, Spherical lenses, Switching, Multilayers, Extreme ultraviolet lithography, Synchrotrons
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