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Dr. Hideyuki Moribe
at NEC Space Technologies Ltd
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Author
Publications (3)
Proceedings Article | 19 May 2008 Paper
Resist pattern inspection function for LM7500 reticle inspection system
Hideyuki Moribe, Yoshikazu Kato, Kazuyoshi Nakamura, Takeshi Bashomatsu, Takahiro Igeta, Kazuhito Ogihara, Takehiko Okada
Proceedings Volume 7028, 70281I (2008) https://doi.org/10.1117/12.793059
KEYWORDS: Inspection, Reticles, Reflectivity, Defect detection, Chromium, Photoresist processing, Deep ultraviolet, Etching, Pellicles, Image transmission
Proceedings Article | 19 May 2008 Paper
Improvement of image quality and inspection speed in LM7500 reticle inspection system
Hideyuki Moribe, Takeshi Bashomatsu, Kenichi Matsumura, Akira Uehara, Hiroyuki Takahashi
Proceedings Volume 7028, 70282K (2008) https://doi.org/10.1117/12.793090
KEYWORDS: Inspection, Reticles, Image quality, Scanners, Telescopes, Image processing, Image transmission, Image acquisition, Image quality standards, Beam propagation method
Proceedings Article | 29 May 2007 Paper
High-performance reticle inspection tool for the 65-nm node and beyond
Tung-Yaw Kang, Chia-Hsien Chen, Chia Hui Ho, Luke Hsu, Yao-Ching Ku, Kazuyoshi Nakamura, Hideyuki Moribe, Takeshi Bashomatsu, Kenichi Matsumura, Keiichi Hatta, Hiroyuki Takahashi, Akira Uehara, Takahiro Igeta, Hiroshi Uno, Ryou Igarashi, Hiroaki Matsuda
Proceedings Volume 6607, 660716 (2007) https://doi.org/10.1117/12.728955
KEYWORDS: Inspection, Reticles, Photomasks, Semiconducting wafers, Defect detection, Particles, Defect inspection, Sensors, Deep ultraviolet, Resolution enhancement technologies
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