Nano-level 3-D measurement is one of the key technologies for the current and future generation of production systems
for semi-conductors, LCDs and nano-devices. To meet with these applications, wide range nano-level 3-D shape
measurement method using combination of RGB lights has been developed. It measures the height of nano-objects using
RGB lights interference color fringes. To analyze the RGB color fringes, the adaptive phase analysis method of
interference fringes has been developed and achieved its efficiency. But it cannot measure the shape of edges. To meet
with the difficulty, the color analysis method on xy-color plane has been introduced. The combination of the phase
measurement method and the color analysis method has measured the 5 micrometer columns precisely. The evaluation
shows that the method has the ability to measure the plane height at 10 nm level measuring deviation with 0,5
micrometer horizontal preciseness. For a practical application, the shape of needles for AFM has been extracted,
successfully.
Nano-level 3-D measurement is one of the key technologies for the current and future generation of production systems
for semi-conductors, LCDs and nano-devices. To meet with these applications, wide range nano-level 3-D shape
measurement method using combination of RGB laser lights has been developed. It measures the height of nano-objects
from the combination of RGB LED lights interference. To analyze the combination of RGB lights, the color analysis
method on xy-color plane has been introduced. In this method, the color changes on xy-color plane means the height
changes. Experimental system to measure the three micro-meter height has been developed, and succeeded to measure
the 50 nm step and 1000 nm step samples. The method has been applied to measure a nano-device, a contact needle for
measurement. The shape of the needle has been extracted, successfully.
We aim to develop a method for distinguishing quality of stone artifacts. A value of stone artifacts depends on the
polishing quality of the surface. However, it is difficult to evaluate quantitatively and its evaluation is performed by
sensibility of experts. According to a theory, experts can sense a minute difference of optical characteristic of polished
stone surface. We propose a simultaneous measurement of spectral reflectivity and birefringence of polished stone
surface using the polarization phase-shifting interferometer. In the polarization phase-shifting interferometry, the phase-shifter
gives a phase difference between perpendicular polarized beams. This phase difference can be considered the
optical retardation. When the linearly polarized beam passes though a sample which has birefringence, the initial phase
of interferogram is shifted. Thus, retardations in each wavelength can be calculated by Fourier analyzing a interferogram.
First, we constructed a coaxial illumination type optical system for verification experiments. As a result, we confirmed
the reflected light from surface is stronger than light from inner. Therefore, it cannot measure inner reflected light which
has valuable optical characteristics. Based on these results, we improved the illumination method of optical system to
oblique illumination. Finally, we can obtain the 2-dimentional spectral reflectivity and birefringence characteristics.
Currently, diagnosis of cancer is performed by biopsy, whereby medical doctors observe a removed specimen, focusing their attention on morphological changes in the cell sequence and cell nuclei. For early cancer, the only effect is a slight increase in the size of the cell nuclei in comparison with normal cells. Based on medical knowledge, it is presumed that an extremely small amount of a specific protein may be contained in a cell nucleus. We propose spectroscopy-tomography of single cell to measure slight changes in this protein. This technology is composed of two elemental technologies, high spatial resolution spectrometry and a precise single cell rotating method. We propose variable phase-contrast spectrometry as the high spatial resolution spectrometry and proximal two-beam optical tweezers as the precise rotating method. By these methods, we can obtain a 3-dimensional distribution of the cell components to a high spatial resolution. We verified the accuracy of variable phase-contrast spectrometry by measuring the height of a diffraction grating. We confirmed that a microsphere can be rotated by proximal two-beam optical tweezers.
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