Mr. Hirohito Koike Profile

Hirohito Koike

at Hitachi High-Tech Corp

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Author

Publications (2)

Proceedings Article | 10 April 2024 Poster + Paper

Defect inspection methodology for contact holes

D. Van den Heuvel, C. Beral, B. Chowrira, P. Foubert, D. De Simone, G. Lorusso, M. Beggiato, S. Das, A. Charley, M. Sugie, N. Ban, H. Koike, M. Isawa, W. Sun

Proceedings Volume 12955, 129553S (2024) https://doi.org/10.1117/12.3015844

KEYWORDS: Semiconducting wafers, Inspection, Extreme ultraviolet, Metrology, Light sources and illumination, Stochastic processes, Etching, Defect inspection, Transmission electron microscopy

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Proceedings Article | 22 February 2021 Presentation + Paper

Massive metrology and inspection solution for EUV by area inspection SEM with machine learning technology

Tsuyoshi Kondo, Naoma Ban, Yasushi Ebizuka, Yasutaka Toyoda, Yukari Yamada, Taeko Kashiwa, Hirohito Koike, Hiroyuki Shindo, Anne-Laure Charley, Mohamed Saib, Frieda Van Roey, Peter De Bisschop, Danilo De Simone, Christophe Beral, Gian Lorusso

Proceedings Volume 11611, 1161111 (2021) https://doi.org/10.1117/12.2583691

KEYWORDS: Inspection, Scanning electron microscopy, Metrology, Extreme ultraviolet, Machine learning, Logic, Stochastic processes, Process control, Critical dimension metrology, Time metrology

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