Hongyu Liu
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 November 2024 Paper
Proceedings Volume 13243, 132430E (2024) https://doi.org/10.1117/12.3035286
KEYWORDS: Microelectromechanical systems, Batteries, Optical microcavities, Fiber optics sensors, Sensors, Electrodes, Silicon, Fabrication, Semiconducting wafers

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