Dr. Houssam Chouaib
at KLA Corp
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 10 April 2024 Poster + Paper
Houssam Chouaib, Teng Shi, Anderson Chou, Shinya Kawanami, Masatomo Takahara, Yeunchian Luo, Zhijie Leiyin, Bin Zeng, Derrick Shaughnessy, Zhengquan Tan, Kaori Sasaki, Naoki Momotori
Proceedings Volume 12955, 129553F (2024) https://doi.org/10.1117/12.3010992
KEYWORDS: Critical dimension metrology, 3D metrology, 3D modeling, Education and training, Scatterometry, Metrology, Machine learning, X-ray optics, X-rays, Semiconducting wafers

Proceedings Article | 10 April 2024 Presentation + Paper
Houssam Chouaib, Valeria Dimastrodonato, Anderson Chou, Agostino Cangianoa, Andrew Cross, Derrick Shaughnessy, Zhengquan Tan, Daniel Schmidt, Curtis Durfee, Shanti Pancharatnam, Julien Frougier, Andrew Greene, Mary Breton
Proceedings Volume 12955, 129550L (2024) https://doi.org/10.1117/12.3010790
KEYWORDS: Semiconducting wafers, Education and training, Transmission electron microscopy, Nanosheets, Gallium arsenide, Data modeling, Ellipsometry, Metrology, Diffractive optical elements, Mathematical optimization

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 129552D (2024) https://doi.org/10.1117/12.3009960
KEYWORDS: Overlay metrology, Mueller matrices, Machine learning, Education and training, Semiconducting wafers, Calibration, Transmission electron microscopy, Metrology, Chemical elements, Algorithm development

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 129552B (2024) https://doi.org/10.1117/12.3009956
KEYWORDS: Overlay metrology, Semiconducting wafers, Machine learning, Scanning electron microscopy, Education and training, Critical dimension metrology, High volume manufacturing, Metrology, Mueller matrices, Spectroscopic ellipsometry

Proceedings Article | 27 April 2023 Poster + Paper
Houssam Chouaib, Anderson Chou, Valeria Dimastrodonato, Shawn Lin, Ben Hsieh, HaoMiao Chang, James Chuang, Brooks Hsiao, Stilian Pandev, Zhengquan Tan, Derrick Shaughnessy
Proceedings Volume 12496, 124962V (2023) https://doi.org/10.1117/12.2658085
KEYWORDS: Education and training, Gallium arsenide, Metrology, Nanosheets, Data modeling, Etching, Silicon, 3D modeling, Mueller matrices, Scatterometry

Showing 5 of 11 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top