Dr. Hua Li Profile

Dr. Hua Li

at Tsinghua Univ

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Publications (2)

Proceedings Article | 4 January 2008 Paper

A micro-electromechanical system design and manufacture considering fabrication error

Hua Li, Gengchen Shi

Proceedings Volume 6836, 68360G (2008) https://doi.org/10.1117/12.756124

KEYWORDS: Metals, Microelectromechanical systems, Polymethylmethacrylate, Error analysis, Tolerancing, Nickel, Photoresist materials, Assembly tolerances, Precision measurement, Mask making

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Proceedings Article | 4 January 2008 Paper

Contrastive study on the mechanical performance of MEMS microsprings fabricated by LIGA and UV-LIGA technology

Hua Li, Gengchen Shi

Proceedings Volume 6836, 68360E (2008) https://doi.org/10.1117/12.756048

KEYWORDS: Nickel, Microelectromechanical systems, Finite element methods, Standards development, Sensors, Humidity, Silicon, Lithium, Aerospace engineering, Synchrotron technology

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