Dr. Huaixin Guo Profile

Dr. Huaixin Guo

at Nanjing Electronic Devices Institute

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 17 April 2020 Paper

Yuheng Huang, Huaixin Guo, Tangsheng Chen

Proceedings Volume 11455, 1145509 (2020) https://doi.org/10.1117/12.2557726

KEYWORDS: Resistance, Thin films, Silicon, Plasma enhanced chemical vapor deposition, Thermal effects, Thermal modeling, Interfaces

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Keywords/Phrases