Dr. Ina Mitra
at SCHOTT AG
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 23 August 2024 Poster + Paper
Janina Krieg, Ina Mitra, Ralf Jedamzik, Clemens Kunisch, Tony Hull, Thomas Westerhoff
Proceedings Volume 13092, 1309240 (2024) https://doi.org/10.1117/12.3018655
KEYWORDS: Zerodur, Glass ceramics, Temperature metrology, Thermal stability, Materials properties, Space telescopes, Mirrors, Telescopes, Design, Thermal modeling

Proceedings Article | 2 June 2004 Paper
Lutz Aschke, Hans Becker, Falk Friemel, Thomas Leutbecher, Nathalie Olschewski, Markus Renno, Frauke Rueggeberg, Mario Schiffler, Frank Schmidt, Frank Sobel, Kurt Walter, Guenter Hess, Frank Lenzen, Konrad Knapp, Jochen Alkemper, Hrabanus Hack, Klaus Megges, Ina Mitra, Rolf Mueller, Uwe Nolte, Joerg Schumacher, Wolfgang Pannhorst
Proceedings Volume 5504, (2004) https://doi.org/10.1117/12.568007
KEYWORDS: Extreme ultraviolet, Photomasks, Multilayers, Extreme ultraviolet lithography, Zerodur, Reflectivity, Polishing, Temperature metrology, Surface finishing, Glasses

Proceedings Article | 20 May 2004 Paper
Ina Mitra, Jochen Alkemper, Rolf Mueller, Uwe Nolte, Axel Engel, Hrabanus Hack, Heiko Kohlmann, Volker Wittmer, Wolfgang Pannhorst, Mark Davis, Lutz Aschke, Konrad Knapp
Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.535193
KEYWORDS: Zerodur, Surface roughness, Temperature metrology, Extreme ultraviolet lithography, Extreme ultraviolet, Glasses, Metrology, Surface finishing, Refractive index, Crystals

Proceedings Article | 16 June 2003 Paper
Ina Mitra, Jochen Alkemper, Uwe Nolte, Axel Engel, Rolf Mueller, Simone Ritter, Hrabanus Hack, Klaus Megges, Heiko Kohlmann, Wolfgang Pannhorst, Mark Davis, Lutz Aschke, Konrad Knapp
Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.484728
KEYWORDS: Zerodur, Surface roughness, Temperature metrology, Extreme ultraviolet, Metrology, Glasses, Standards development, Extreme ultraviolet lithography, Surface finishing, Crystals

Proceedings Article | 1 July 2002 Paper
Ina Mitra, Mark Davis, Jochen Alkemper, Rolf Mueller, Heiko Kohlmann, Lutz Aschke, Ewald Moersen, Simone Ritter, Hrabanus Hack, Wolfgang Pannhorst
Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472322
KEYWORDS: Zerodur, Temperature metrology, Glasses, Critical dimension metrology, Extreme ultraviolet lithography, Extreme ultraviolet, Solids, Refractive index, Crystals, Photomasks

Showing 5 of 6 publications
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