Dr. Inho Choi Profile

Dr. Inho Choi

at Jeonbuk National Univ

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Author

Publications (6)

Proceedings Article | 10 April 2024 Presentation + Paper

Dynamic spectroscopic imaging ellipsometer for high-throughput full patterned wafer mapping

G. Hwang, S. Kheiryzadehkhanghah, S. Choi, I. Choi, S. Kim, D. Kim

Proceedings Volume 12955, 129550C (2024) https://doi.org/10.1117/12.3011003

KEYWORDS: Imaging spectroscopy, Imaging systems, Spectroscopic ellipsometry, Interferometry, Thin films

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Proceedings Article | 10 April 2024 Presentation + Paper

Dynamic ultra-thin film thickness line-profile extraction from a warped Si substrate

S. Kheiryzadehkhanghah, G. Hwang, I. Choi, S. Choi, D. Kim

Proceedings Volume 12955, 1295512 (2024) https://doi.org/10.1117/12.3011000

KEYWORDS: Film thickness, Thin films, Mach Zehnder interferometers, Ellipsometry, Thin film deposition, Spectroscopic ellipsometry

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Proceedings Article | 10 April 2024 Presentation + Paper

High speed 2D material visualization by using a microscopic dynamic spectroscopic imaging ellipsometer

S. Choi, G. Hwang, S. Kheiryzadehkhanghah, I. Choi, W. Chegal, Y. Cho, D. Kim

Proceedings Volume 12955, 129550F (2024) https://doi.org/10.1117/12.3010995

KEYWORDS: 2D materials, Inspection, Imaging systems, Visualization, Spatial resolution, Metrology

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Proceedings Article | 8 December 2022 Paper

High speed thin film thickness mapping by using dynamic spectroscopic imaging ellipsometry

Daesuk Kim, Vamara Dembele, Sukhyun Choi, Gukhyeon Hwang, Saeid Kheiryzadehkhanghah, Inho Choi, Junbo Shim

Proceedings Volume 12480, 124800O (2022) https://doi.org/10.1117/12.2660191

KEYWORDS: Spectroscopy, Thin films, Imaging spectroscopy, Ellipsometry, Spatial resolution, Silicon, Imaging systems, Semiconducting wafers, Interferometry, Interferometers

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Proceedings Article | 27 October 2021 Paper

Large scale thin film thickness uniformity extraction based on dynamic spectroscopic ellipsometry

Daesuk Kim, Gukhyeon Hwang, Sukhyun Choi, Vamara Dembele, Saeid Kheiryzadehkhanghah, Inho Choi, Chung Song Kim

Proceedings Volume 11927, 119270M (2021) https://doi.org/10.1117/12.2616271

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Showing 5 of 6 publications

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