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Ira Naot
at KLA Corp
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Author
Publications (1)
Proceedings Article | 20 March 2020 Paper
OPO reduction by novel target design
Zephyr Liu, Eitan Hajaj, Ira Naot, Raviv Yohanan, Yoav Grauer
Proceedings Volume 11325, 113252S (2020) https://doi.org/10.1117/12.2552000
KEYWORDS: Metrology, Optical parametric oscillators, Optical design, Overlay metrology, 3D acquisition, 3D metrology, Integrated circuits, Manufacturing, Logic, Process control
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