Israel Reichental
at Bruker Technologies Ltd.
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 22 March 2023 Open Access
JM3, Vol. 22, Issue 03, 031205, (March 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.031205
KEYWORDS: Semiconducting wafers, X-rays, Metrology, Scattering, Etching, 3D modeling, Model-based design, Laser scattering, Critical dimension metrology, Nondestructive evaluation

Proceedings Article | 22 February 2021 Presentation + Paper
Matthew Wormington, Adam Ginsburg, Israel Reichental, Alex Dikopoltsev, Alex Krokhmal, Yuri Vinshtein, Paul Ryan, Rahul Korlahalli, Franklin Wong, Silvio Rabello, Yang Song, Jie Li
Proceedings Volume 11611, 116110W (2021) https://doi.org/10.1117/12.2583966
KEYWORDS: X-rays, Semiconductors, Critical dimension metrology, Semiconducting wafers, Metrology, X-ray characterization, Scattering, Etching, Capacitors, 3D metrology

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