Mr. J. Martin Algots Profile

J. Martin Algots

Engineering Consultant at Algots Design

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Author

Publications (4)

Proceedings Article | 6 May 2005 Paper

Liquid metal micro-droplet generator for laser produced plasma target delivery used in an extreme ultra-violet source

J. Algots, Oscar Hemberg, Alexander Bykanov

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.601045

KEYWORDS: Liquids, Plasma, Extreme ultraviolet, Metals, Tin, Ultraviolet radiation, Lithium, High power lasers, Lithography, Plasma generation

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Proceedings Article | 28 May 2004 Paper

Verification of compaction and rarefaction models for fused silica with 40 billion pulses of 193-nm excimer laser exposure and their effects on projection lens imaging performance

J. Martin Algots, Richard Sandstrom, William Partlo, Kazuhiro Takahashi, Hiroyuki Ishii, Yasuo Hasegawa

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.537132

KEYWORDS: Silica, Data modeling, Wavefronts, Wavefront aberrations, Refractive index, Reticles, Statistical modeling, Performance modeling, Projection systems, Interferometry

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Proceedings Article | 26 June 2003 Paper

Compaction and rarefaction of fused silica with 193-nm excimer laser exposure

J. Martin Algots, Richard Sandstrom, William Partlo, Petar Maroevic, Eric Eva, Michael Gerhard, Ralf Linder, Frank Stietz

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485530

KEYWORDS: Silica, Pulsed laser operation, Wavefronts, Statistical modeling, Refractive index, Data modeling, Excimer lasers, Laser energy, Optical lithography, Laser induced damage

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Proceedings Article | 14 September 2001 Paper

Wavelength stabilization in an excimer laser source using piezoelectric active vibration control

Ronald Spangler, Robert Jacques, Daniel Brown, J. Algots, William Partlo

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435653

KEYWORDS: Ferroelectric materials, Sensors, Excimer lasers, Servomechanisms, Mirrors, Fluctuations and noise, Actuators, Active vibration control, Control systems, Acoustics

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