Dr. Jaehwang Jung
Staff Engineer at SAMSUNG Electronics Co., Ltd.
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 15 August 2023 Presentation + Paper
Proceedings Volume 12618, 126180B (2023) https://doi.org/10.1117/12.2677195
KEYWORDS: Objectives, Beam splitters, Polarization, Temperature metrology, Ellipsometry, Error analysis, Optical components

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 1249610 (2023) https://doi.org/10.1117/12.2657852
KEYWORDS: Mueller matrices, Line edge roughness, Polarization, Metrology, Simulations, Critical dimension metrology, Holograms, Ellipsometry, Holography

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume 12053, 120530R (2022) https://doi.org/10.1117/12.2607442
KEYWORDS: Ellipsometry, Metrology, Interferometry, Semiconducting wafers, Wafer-level optics, Spectroscopic ellipsometry, Silica, Optical metrology, Microscopy, Mathematical modeling

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12053, 1205311 (2022) https://doi.org/10.1117/12.2614734
KEYWORDS: Holograms, Ellipsometry, Overlay metrology, Polarization, Critical dimension metrology, Metrology, Image sensors, Reflectivity, Objectives, Semiconducting wafers

Proceedings Article | 1 August 2021 Presentation + Paper
Proceedings Volume 11817, 1181707 (2021) https://doi.org/10.1117/12.2593375
KEYWORDS: Ellipsometry, Metrology, Semiconducting wafers, Reconstruction algorithms, Semiconductors, Polarization, Objectives, Image sensors, Optical metrology, Linear polarizers

Showing 5 of 9 publications
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