Dr. James A. Gregory
at MIT Lincoln Lab
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 23 August 2021 Presentation + Paper
Ralf Heilmann, Alexander Bruccoleri, Jungki Song, Bethany Levenson, Brian Smallshaw, Mallory Whalen, Alan Garner, Sarah Trowbridge Heine, Herman Marshall, Matthew Cook, James Gregory, Renee Lambert, Dmitri Shapiro, Douglas Young, Eric Gullikson, Tomoyuki Nonaka, Akimi Uchida, Manuel Quijada, Ed Hertz, Peter Cheimets, Randall Smith, Mark Schattenburg
Proceedings Volume 11822, 1182215 (2021) https://doi.org/10.1117/12.2594951
KEYWORDS: Diffraction gratings, Computed tomography, Semiconducting wafers, X-rays, Diffraction, Etching, Deep reactive ion etching, Photomasks, Optical alignment, X-ray diffraction

Proceedings Article | 13 December 2020 Presentation + Paper
Proceedings Volume 11444, 114441H (2020) https://doi.org/10.1117/12.2562388
KEYWORDS: Diffraction gratings, X-rays, Manufacturing, Spectroscopy, Computed tomography, Diffraction, Absorption, Emission spectroscopy, Diagnostics, Plasmas

Proceedings Article | 6 July 2018 Paper
K. Ryu, C. Leitz, H. Clark, X. Chen, M. Cooper, M. Zhu, P. Welander, R. Lambert, V. Bolkhovsky, D.-R. Yost, B. Burke, J. Gregory, V. Suntharalingam
Proceedings Volume 10699, 106993P (2018) https://doi.org/10.1117/12.2311512
KEYWORDS: Semiconducting wafers, Charge-coupled devices, Hydrogen, Oxides, Silicon, Quantum efficiency, Wafer bonding, Ultraviolet radiation, Interfaces, Plasma enhanced chemical vapor deposition, Molecular beam epitaxy

SPIE Journal Paper | 11 September 2015 Open Access
JATIS, Vol. 1, Issue 04, 046001, (September 2015) https://doi.org/10.1117/12.10.1117/1.JATIS.1.4.046001
KEYWORDS: Silicon, Semiconducting wafers, Ultraviolet radiation, Sensors, Oxides, Quantum efficiency, Doping, CMOS technology, Imaging arrays, Antimony

Proceedings Article | 23 July 2014 Paper
Proceedings Volume 9154, 915412 (2014) https://doi.org/10.1117/12.2054840
KEYWORDS: Silicon, Semiconducting wafers, Sensors, Ultraviolet radiation, Doping, Oxides, Quantum efficiency, CMOS sensors, Antimony, CMOS devices

Showing 5 of 18 publications
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