Manufacturing is progressing towards the utilisation of smart and autonomous manufacturing processes, facilitated by deeply integrated sensors providing rapid feedback, to enable tighter process control and ‘right first-time’ fabrication methods. Optical components are inherently heavy and bulky and consequently so is current optical instrumentation making it unsuitable to provide the in-situ measurements required to fully realise the vision of future manufacturing. Optical metasurfaces, being able to replicate the function of conventional optical elements, offer a step change in optical instrumentation size and weight. Here, we report on our monolithic metasurface confocal sensor that performs all the necessary optical manipulations to perform as an ultra-compact confocal sensor whilst also being rugged against misalignment. We have subsequently built on this approach to develop a tip-tilt displacement sensor which is achieved by interleaving three lenses into a single metasurface, each acting as a chromatic confocal sensor that is offset from each other.
Thin film flexible electronics refer to a class of electronic devices built on flexible substrates. Examples includes printed Li batteries, Thin film flexible electronics refer to a class of electronic devices manufactured by multiple layering and scribing on flexible polymer substrates. Examples of such devices includes printed Li batteries, flexible photovoltaic cells and light emitting diodes. These devices are often mass manufactured by Roll-to-Roll processing (R2R). Whilst the basic technology is well established, the increasing demands on precision environmental protection and multi layering of devices means that in-process measurement of printed surface features is a critical bottle neck in terms of developing R2R as a process route. The purpose of the present paper is to review the current critical dimensional metrology needs in R2R manufacture and in particular to highlight the development of a new inprocess surface metrology system based on Multi-wavelength Polarizing Interferometry (MPI). The system is capable of measurement in real time, is environmentally robust and has nanometre resolution. The paper concludes by highlighting an example of the first trial implementation of the MPI on a production level R2R machine and discussed issues with quantification of film dimensions and associated signal processing
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