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Jan Besser
at Fraunhofer ENAS
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Author
Publications (2)
Proceedings Article | 19 February 2014 Paper
Subwavelength grating reflectors in MEMS tunable Fabry-Perot infrared filters with large aperture
Steffen Kurth, Karla Hiller, Marco Meinig, Jan Besser, Mario Seifert, Martin Ebermann, Norbert Neumann, Florian Schlachter, Thomas Gessner
Proceedings Volume 8995, 89950I (2014) https://doi.org/10.1117/12.2040339
KEYWORDS: Reflectors, Transmittance, Semiconducting wafers, Resonators, Reflectivity, Aluminum, Wafer bonding, Silicon, Absorbance, Metals
Proceedings Article | 5 March 2013 Paper
Fabrication of subwavelength holes using nanoimprint lithography
A. Weiss, J. Besser, M. Baum, R. Saupe, T. Otto, T. Gessner
Proceedings Volume 8613, 86131N (2013) https://doi.org/10.1117/12.2014273
KEYWORDS: Nanoimprint lithography, Metals, Surface plasmons, Aluminum, Finite-difference time-domain method, Atomic force microscopy, Silicon, Ultraviolet radiation, Semiconducting wafers, Dielectrics
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