Mr. Jay Chih-Chieh Chen Profile

Jay Chih-Chieh Chen

at KLA-Tencor Corp

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Author

Publications (2)

Proceedings Article | 24 May 2004 Paper

Capability of spectroscopic ellipsometry-based profile metrology for detecting the profile excursion of polysilicon gate

Mike Yeh, Shu-Ping Fang, Bo-Jau Tsau, Chih-Chung Huang, Benjamin Lin, Steven Fu, Jay Chen, Regina Freed, Ted Dziura, Mike Slessor

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.536269

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Metrology, Etching, Spectroscopic ellipsometry, Cadmium, Scanning electron microscopy, Transistors, Atomic force microscopy, Single crystal X-ray diffraction

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Proceedings Article | 15 July 2003 Paper

In-line measurement characterization for multilayer film stack of SiGe by advance spectroscopy ellipsometer

Jay Chen, Arun Srivatsa, Chin Cheng Chien, Tony Liu

Proceedings Volume 5041, (2003) https://doi.org/10.1117/12.485236

KEYWORDS: Germanium, Silicon, Spectroscopy, Semiconducting wafers, Wafer-level optics, Multilayers, Gallium arsenide, Crystals, Semiconductors, Fiber optic communications

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