Dr. Jean-Louis Sanchez Profile

Dr. Jean-Louis Sanchez

at LAAS-CNRS

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 26 February 2008 Paper

Micro-inductors integrated on silicon for DC-DC converters

T. El Mastouli, J.P. Laur, J.L. Sanchez, M. Brunet, D. Bourrier, M. Dilhan

Proceedings Volume 6882, 68820A (2008) https://doi.org/10.1117/12.763085

KEYWORDS: Magnetism, Chemical mechanical planarization, Electroplating, Copper, Prototyping, Silicon, Inductance, Resistance, Photoresist materials, Micromachining

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Proceedings Article | 23 January 2006 Paper

Development of fabrication techniques for high-density integrated MIM capacitors in power conversion equipment

M. Brunet, P. Dubreuil, E. Scheid, J-L. Sanchez

Proceedings Volume 6109, 61090Q (2006) https://doi.org/10.1117/12.646121

KEYWORDS: Etching, Silicon, Capacitance, Capacitors, Resistance, Deep reactive ion etching, Electrodes, Dielectrics, Plasma, Ions

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Proceedings Article | 30 December 2003 Paper

Realization of vertical P+ wall through-wafer

J. Sanchez, E. Scheid, P. Austin, M. Breil, H. Carriere, Pascal Dubreuil, E. Imbernon, F. Rossel, B. Rousset

Proceedings Volume 5342, (2003) https://doi.org/10.1117/12.531533

KEYWORDS: Etching, Silicon, Semiconducting wafers, Boron, Diffusion, Doping, Reactive ion etching, Oxides, Plasma etching, Polymers

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Proceedings Article | 30 December 2003 Paper

Fabrication of integrated inductors on silicon for fully integrated DC-DC microconverters

Ghislain Troussier, Jean-Pierre Laur, Jean-Louis Sanchez, David Bourrier, Veronique Conedera, Monique Dilhan, Norbert Fabre, Yves Lembeye, Herve Morel, Bruno Cogitore

Proceedings Volume 5342, (2003) https://doi.org/10.1117/12.531969

KEYWORDS: Magnetism, Copper, Photoresist materials, Electroplating, Photoresist processing, Silicon, Optical lithography, Metals, Manufacturing, CMOS technology

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