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Jean-Yee Wu
PhD candidate at National Central Univ
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Publications (1)
Proceedings Article | 20 August 2005 Paper
Comparison of silicon oxide films deposited by RF ion beam sputtering and e-beam gun evaporation in visible to UV ranges
Proceedings Volume 5870, 58700G (2005) https://doi.org/10.1117/12.615822
KEYWORDS: Silicon, Silicon films, Ultraviolet radiation, Thin films, Sputter deposition, Silica, Ion beams, FT-IR spectroscopy, Refractive index, Oxides
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