Mr. Jeffery Kao-Tun Chen Profile

Jeffery Kao-Tun Chen

Engineer at Winbond Electronics Corp

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Publications (2)

Proceedings Article | 20 March 2018 Paper

A portable pattern-based design technology co-optimization flow to reduce optical proximity correction run-time

Yi-Chieh Chen, Tsung-Han Li, Hung-Yu Lin, Kao-Tun Chen, Chun-Sheng Wu, Ya-Chieh Lai, Philippe Hurat

Proceedings Volume 10588, 1058810 (2018) https://doi.org/10.1117/12.2297077

KEYWORDS: Optical proximity correction, Integrated circuit design, Optics manufacturing, Mathematical modeling, Design for manufacturability, Electronics, Integrated circuits, Integrated optics, Semiconductor manufacturing

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Proceedings Article | 4 March 2010 Paper

The impact of resist model on mask 3D simulation accuracy beyond 40nm node memory patterns

Kao-Tun Chen, Shin-Shing Yeh, Ya-Hsuan Hsieh, Jun-Cheng Lai, Stewart Robertson, John Biafore, Sanjay Kapasi, Arthur Lin

Proceedings Volume 7640, 76401S (2010) https://doi.org/10.1117/12.846010

KEYWORDS: 3D modeling, Photomasks, Data modeling, Calibration, Performance modeling, 3D image processing, Semiconducting wafers, Seaborgium, Instrument modeling, Optical simulations

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