Mr. Jiadong Ren Profile

Jiadong Ren

at Shanghai Huali Integrated Circuit Corp.

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Author

Publications (2)

Proceedings Article | 26 May 2022 Poster + Presentation + Paper

In-line monitoring of overlay and process window using design-assisted voltage contrast inspection for 14nm FINFET technology

Runling Li, I-Kai Hsu, Tomasz Brozek, Linrong Yang, Debiao He, Fangrui Wu, Jiadong Ren, Yefang Zhu, Yan Zhang, Pei Liu, Haiqiong Zhang, Guifeng Zhang, Yingying Fu, Shan Yin, Yujie Jia, Bo Yu

Proceedings Volume 12053, 120531U (2022) https://doi.org/10.1117/12.2613633

KEYWORDS: Lithography, Semiconducting wafers, Process control, Inspection, Fin field effect transistors, Optical alignment

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Proceedings Article | 22 February 2021 Presentation + Paper

Pattern-centric yield management approach with machine learning to detect and track defects with full chip coverage

Yu Zhang, Shirui Yu, Jiaqi Liu, Renyang Meng, Long Yin, Kai Wang, Kun Cai, Xingdi Zhang, Xinghua Song, Jiadong Ren, Abhishek Vikram, Changlian Yan, Guojie Cheng, Hui Wang, Qing Zhang, Wenkui Liao

Proceedings Volume 11614, 1161406 (2021) https://doi.org/10.1117/12.2583454

KEYWORDS: Scanning electron microscopy, Wafer inspection, Machine learning, Semiconducting wafers, Databases, Defect detection, Wafer-level optics, Image processing, Semiconductor manufacturing, Optical proximity correction

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