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Jiaxin Lin
at Univ of Chinese Academy of Sciences
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Publications (1)
Proceedings Article | 23 March 2020 Paper
Compressive sensing method for EUV source optimization using different bases
Jiaxin Lin, Lisong Dong, Taian Fan, Xu Ma, Rui Chen, Xiaoran Zhang, Hans-Juergen Stock, Yayi Wei
Proceedings Volume 11323, 113232J (2020) https://doi.org/10.1117/12.2551897
KEYWORDS: Extreme ultraviolet, Compressed sensing, Extreme ultraviolet lithography, Computer simulations
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