Mr. Jingkang Qin Profile

Jingkang Qin

at Beijing Superstring Academy of Memory Technology

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Publications (2)

Proceedings Article | 12 November 2024 Poster + Paper

Accurate ILT model calibration using curvilinear mask and all-angle gauges

Juan Wei, Peng Xu, Guangyu Sun, Jingkang Qin, Jinlai Liu, Cuixiang Wang, Futian Wang, Jiangliu Shi, Qingchen Cao

Proceedings Volume 13216, 1321620 (2024) https://doi.org/10.1117/12.3034460

KEYWORDS: Contour modeling, Performance modeling, Calibration, 3D mask effects, Lithography, Optical proximity correction, Modeling

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Proceedings Article | 21 November 2023 Poster + Paper

Optimized test pattern selection with machine learning method

Peng Xu, Juan Wei, Jingkang Qin, Jinlai Liu, Guangyu Sun, Song Sun, Cuixiang Wang, Qingchen Cao, Jiangliu Shi

Proceedings Volume 12751, 1275113 (2023) https://doi.org/10.1117/12.2685435

KEYWORDS: Data modeling, Matrices, Optical proximity correction, Machine learning, Lithography, Advanced patterning, Active learning, Process modeling, Deconvolution

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