Dr. Jinwoo Ahn
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 15 August 2023 Presentation + Paper
Proceedings Volume 12618, 126180B (2023) https://doi.org/10.1117/12.2677195
KEYWORDS: Objectives, Beam splitters, Polarization, Temperature metrology, Ellipsometry, Error analysis, Optical components

Proceedings Article | 27 April 2023 Paper
Proceedings Volume 12496, 124962X (2023) https://doi.org/10.1117/12.2658131
KEYWORDS: Critical dimension metrology, Semiconducting wafers, Metrology, Semiconductors, Mueller matrices, Ellipsometry, Inspection

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 1249610 (2023) https://doi.org/10.1117/12.2657852
KEYWORDS: Mueller matrices, Line edge roughness, Polarization, Metrology, Simulations, Critical dimension metrology, Holograms, Ellipsometry, Holography

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 124960L (2023) https://doi.org/10.1117/12.2657414
KEYWORDS: Overlay metrology, Mueller matrices, Semiconducting wafers, Spectroscopic ellipsometry, Critical dimension metrology, Imaging spectroscopy, Metrology, Polarization, Polysomnography, Image sensors

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