Dr. Jinyong Kim Profile

Dr. Jinyong Kim

at SAMSUNG Electronics Co., Ltd.

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Author

Publications (3)

Proceedings Article | 27 April 2023 Presentation + Paper

Mueller matrix metrology with multi-angle information using multiple self-interference

Garam Choi, Jinyong Kim, Daehoon Han, Young-Uk Jin, Soonhong Hwang, Jinseob Kim, Wookrae Kim, Jaehwang Jung, Seungwoo Lee, Taejoong Kim, Jinwoo Ahn, Myungjun Lee, Gideok Kim, Su-Young Lee, Yusin Yang

Proceedings Volume 12496, 1249610 (2023) https://doi.org/10.1117/12.2657852

KEYWORDS: Mueller matrices, Line edge roughness, Polarization, Metrology, Simulations, Critical dimension metrology, Holograms, Ellipsometry, Holography

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Proceedings Article | 13 June 2022 Presentation

Interferometric ellipsometry for massive angular spectra to overcome sensitivity limitation in device metrology

Jaehwang Jung, Jinseob Kim, Jinyong Kim, Seungwoo Lee, Seoyeon Jeong, Inho Shin, Wookrae Kim, Changhoon Choi, Myungjun Lee

Proceedings Volume 12053, 120530R (2022) https://doi.org/10.1117/12.2607442

KEYWORDS: Ellipsometry, Metrology, Interferometry, Semiconducting wafers, Wafer-level optics, Spectroscopic ellipsometry, Silica, Optical metrology, Microscopy, Mathematical modeling

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Proceedings Article | 26 May 2022 Presentation + Paper

Sensitivity and repeatability performance on overlay and CD measurement by incorporating hologram based ellipsometry

Yasuhiro Hidaka, Jinyong Kim, Jaehwang Jung, Mitsunori Numata, Wookrae Kim, Shinji Ueyama, Myungjun Lee

Proceedings Volume 12053, 1205311 (2022) https://doi.org/10.1117/12.2614734

KEYWORDS: Holograms, Ellipsometry, Overlay metrology, Polarization, Critical dimension metrology, Metrology, Image sensors, Reflectivity, Objectives, Semiconducting wafers

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