Dr. Jiyoung Chu Profile

Dr. Jiyoung Chu

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Publications (9)

Proceedings Article | 3 October 2022 Poster + Paper

On-machine laser spot diagnostics by scanning linear image sensor for maskless lithography system

Akinori Ohkubo, Jiyoung Chu, Janghwi Lee, Sunghwi Cho, Wondon Joo, Sangwoo Bae

Proceedings Volume 12221, 122211B (2022) https://doi.org/10.1117/12.2631007

KEYWORDS: Diagnostics, Image sensors, Sensors, Geometrical optics, Digital micromirror devices, Calibration, CCD image sensors, Maskless lithography, Micromirrors, Wavefront aberrations

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Proceedings Article | 3 October 2022 Poster + Paper

Machine vision system for alignment in die-to-wafer bonder

Jiyoung Chu, Minhwan Seo, Hyungjin Kim, Wondon Joo, Sungmin Ahn, Sangwoo Bae

Proceedings Volume 12222, 122220L (2022) https://doi.org/10.1117/12.2633000

KEYWORDS: Semiconducting wafers, Optical alignment, Beam splitters, Distortion, Prisms, Wafer bonding, Machine vision, Cameras

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Proceedings Article | 20 August 2020 Poster + Paper

Signal-to-noise ratio evaluation for the nanometer-scale patterned defect inspection using dark-field microscopy with tailored polarization illumination

Akinori Ohkubo, Janghwi Lee, Hyungu Kim, Jiyoung Chu, Sungho Jang, Sangwoo Bae, Wondon Joo

Proceedings Volume 11485, 114850N (2020) https://doi.org/10.1117/12.2567116

KEYWORDS: Signal to noise ratio, Polarization, Scattering, Near field, Cameras, Semiconducting wafers, Ellipsometry

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Proceedings Article | 20 August 2020 Poster + Paper

Beam transformation device using total internal reflection

Jiyoung Chu, Minhwan Seo, Sunghwi Cho, Woocheol Jeong, Hunyong Park, Sangwoo Bae, Wondon Joo

Proceedings Volume 11486, 114860K (2020) https://doi.org/10.1117/12.2567965

KEYWORDS: Beam shaping, Prisms, Reflection, Semiconductor lasers, Reflectivity, Mirrors, Beam propagation method, Optical simulations, Optical components

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Proceedings Article | 22 August 2017 Paper

Calculation of lens alignment errors using the ray transfer matrices for the lens assembly system with an autocollimator and a rotation stage

Jiyoung Chu, Sungwhi Cho, Won Don Joo, Sangdon Jang

Proceedings Volume 10377, 103770L (2017) https://doi.org/10.1117/12.2273595

KEYWORDS: Autocollimators, Matrices, Spherical lenses, Precision lens assemblies, Optical alignment

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SPIE Journal Paper | 1 September 2010

Spatially resolved height response of phase-shifting interferometers measured using a patterned mirror with varying spatial frequency

Jiyoung Chu, Quandou Wang, John Lehan, Guangjun Gao, Ulf Griesmann

OE, Vol. 49, Issue 09, 095601, (September 2010) https://doi.org/10.1117/12.10.1117/1.3488052

KEYWORDS: Interferometers, Mirrors, Spatial frequencies, Phase shifts, Sensors, Imaging systems, Optical engineering, Charge-coupled devices, Image resolution, Standards development

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Proceedings Article | 11 August 2008 Paper

Measuring the phase transfer function of a phase-shifting interferometer

Jiyoung Chu, Quandou Wang, John Lehan, Guangjun Gao, Ulf Griesmann

Proceedings Volume 7064, 70640C (2008) https://doi.org/10.1117/12.795243

KEYWORDS: Spatial frequencies, Interferometers, Mirrors, Silica, Imaging systems, Chromium, Phase shifts, Modulation transfer functions, Photoresist materials, Lithography

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Proceedings Article | 14 August 2006 Paper

Absolute distance measurements using point-diffracted spherical waves

Jiyoung Chu, Seung-Woo Kim

Proceedings Volume 6293, 62930P (2006) https://doi.org/10.1117/12.678690

KEYWORDS: Distance measurement, Wavefronts, Spherical lenses, Interferometry, Photodetectors, Monochromatic aberrations, Single mode fibers, Optical fibers, Interferometers, Diffraction

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Proceedings Article | 2 August 2004 Paper

Two-point diffraction interferometer for absolute distance measurement

Seung-Woo Kim, Hyug-Gyo Rhee, Jiyoung Joo, Young Jin Kim

Proceedings Volume 5531, (2004) https://doi.org/10.1117/12.558834

KEYWORDS: Interferometers, Diffraction, Spherical lenses, Heterodyning, Homodyne detection, Charge-coupled devices, Distance measurement, Calibration, Helium neon lasers, Interferometry

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Showing 5 of 9 publications

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