Dr. John Scanlan Profile

Dr. John Scanlan

Chief Technologist at Straatum Processware Ltd

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Publications (2)

Proceedings Article | 17 May 2005 Paper

Broadband RF process-state sensor for fault detection and classification

Francisco Martinez, Paul Scullin, John Scanlan

Proceedings Volume 5755, (2005) https://doi.org/10.1117/12.606991

KEYWORDS: Sensors, Plasma, Plasma etching, Etching, Signal to noise ratio, Signal processing, Process control, Digital signal processing, Semiconducting wafers, Sensor technology

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Proceedings Article | 1 July 2003 Paper

Knowledge-based process control for fault detection and classification

John Scanlan, Kevin O'Leary

Proceedings Volume 5044, (2003) https://doi.org/10.1117/12.485290

KEYWORDS: Process control, Plasma, Semiconducting wafers, Sensors, Data modeling, Library classification systems, Phase modulation, Process modeling, Etching, Statistical modeling

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