An optical switch is fabricated based on nanocrystalline vanadium oxide (VOx) thin film using micromachining
technology. An "on" state with semiconducting phase to an "off" state with metallic phase is controlled by applying a
DC power to Aurum electrodes of the optical switch. The optical switching performance for the fabricated device is
investigated at optical communication wavelength of 1.55μm. The heater power requires to achieve switching action is
about 15mW. The testing results show that the extinction ratio and switching response time are 14dB and 2ms,
respectively.
Micro- and nanopolycrystalline VO2 thin films with hysteretic first-order metal-insulator transition were fabricated by the reactive ion-beam sputtering method. The phase transition temperatures of the micro- and nanopolycrystalline films are at 68 and 45 °C, respectively. Using the random-resistor-network model, the characteristics of hysteretic resistance versus temperature are simulated for these films. The modeling results are checked against the experimental measurements. There is satisfactory agreement between the calculated resistance-temperature trajectories and the measured major hysteresis loops for both micro- and nanopolycrystalline films over the whole temperature range from the low-temperature semiconductor behavior to the high-temperature metallic state, which gives strong support to the present approach.
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