Dr. Jun Uzuhashi Profile

Dr. Jun Uzuhashi

at National Institute for Materials Science

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 15 March 2023 Presentation + Paper

Annealing properties of vacancy-type defects in ion implanted GaN during ultra-high-pressure annealing studied by using a monoenergetic positron beam

Akira Uedono, Hideki Sakurai, Jun Uzuhashi, Tetsuo Narita, Kacper Sierakowski, Shoji Ishibashi, Shigefusa Chichibu, Michal Bockowski, Jun Suda, Tadakatsu Ohokubo, Nobuyuki Ikarashi, Kazuhiro Hono, Tetsu Kachi

Proceedings Volume 12421, 124210C (2023) https://doi.org/10.1117/12.2646233

KEYWORDS: Annealing, Gallium nitride, Magnesium, Gallium, Ions, Ion implantation, Silicon, Doppler effect, Solids, Chemical species

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years