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Dr. Jung-Jin Kim
at SAMSUNG Electronics Co Ltd
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Author
Publications (1)
Proceedings Article | 20 May 2016 Paper
Formation mechanism of the photomask blanks material related haze
Jung-Jin Kim, Junyoul Choi, Soowan Koh, Minho Kim, Jiyoung Lee, Han-Shin Lee, Byung Gook Kim, Chan-uk Jeon
Proceedings Volume 9984, 99840W (2016) https://doi.org/10.1117/12.2246678
KEYWORDS: Air contamination, Photomasks, Molybdenum, Ions, Transmission electron microscopy, Silicon, Critical dimension metrology, Wet etching, Scanners, Pellicles
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