Mr. Junhwa Jung Profile

Junhwa Jung

at SAMSUNG Electronics Co Ltd

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 17 November 2016 Paper

Junhwa Jung, Youngkeun Kim, Il-Yong Jang, Byung-Gook Kim, Chan-Uk Jeon, Minwook Kang, Changmin Lee, Jae Hahn

Proceedings Volume 9985, 99851S (2016) https://doi.org/10.1117/12.2242406

KEYWORDS: Photomasks, Etching, Plasma, Chromium, Argon, Dry etching, Chlorine, Emission spectroscopy, Critical dimension metrology, Plasma etching

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Keywords/Phrases