CONFERENCE PROCEEDINGS
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Junpei Sawamura
at Nikon Corp
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Author
Publications (2)
Proceedings Article | 26 March 2019 Paper
Standalone alignment technology enabling feed-forward compensation of on-product overlay errors
Takehisa Yahiro, Junpei Sawamura, Sonyong Song, Sayuri Tanaka, Yuji Shiba, Satoshi Ando, Hiroyuki Nagayoshi, Jun Ishikawa, Masahiro Morita, Yuichi Shibazaki
Proceedings Volume 10959, 1095908 (2019) https://doi.org/10.1117/12.2514777
KEYWORDS: Optical alignment, Semiconducting wafers, Optical parametric oscillators, Scanners, Distortion, Sensors, Metrology, Wafer testing, Sensing systems, Overlay metrology
Proceedings Article | 13 March 2018 Paper
Feed-forward alignment correction for advanced overlay process control using a standalone alignment station "Litho Booster"
Takehisa Yahiro, Junpei Sawamura, Tomonori Dosho, Yuji Shiba, Satoshi Ando, Jun Ishikawa, Masahiro Morita, Yuichi Shibazaki
Proceedings Volume 10585, 105852Z (2018) https://doi.org/10.1117/12.2297300
KEYWORDS: Semiconducting wafers, Optical alignment, Optical parametric oscillators, Process control, Overlay metrology, Metrology, Scanners, Distortion, Lithography, Manufacturing
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