To enhance the precision manufacturing of microstructures, a three-dimensional (3D) isotropic microprobe was developed. This microprobe is a kind of elastic probe based on three-flexible-hinge suspension and orthogonal microball collimation. Utilizing the rotation and translation of the three-flexible-hinge suspension, the 3D tip displacements were transformed into the 3D displacements of the microball of the transfer stylus which was fixed in the reverse coaxial direction to the measuring stylus, then the 3D displacements of the microball were transformed into centroid position shifts of the light spots by the orthogonal microball collimation optical paths. The analysis and experimental results indicated that the X, Y, and Z stiffnesses at the tip of the microprobe were approximately 23 N/m each, the X, Y, and Z sensitivities of the microprobe were respectively 157 pixel/μm, 158 pixel/μm, and 165 pixel/μm, and the X, Y, and Z resolutions of the microprobe were 5 nm each. This microprobe could help realize low measurement force, 3D isotropic measurement of microstructures, and improvement of the measurement accuracy
Micro parts with high aspect ratios have been widely used in different fields including aerospace and defense industries, while the dimensional measurement of these micro parts becomes a challenge in the field of precision measurement and instrument. To deal with this contradiction, several probes for the micro parts precision measurement have been proposed by researchers in Center of Ultra-precision Optoelectronic Instrument (UOI), Harbin Institute of Technology (HIT). In this paper, optical fiber probes with structures of spherical coupling(SC) with double optical fibers, micro focal-length collimation (MFL-collimation) and fiber Bragg grating (FBG) are described in detail. After introducing the sensing principles, both advantages and disadvantages of these probes are analyzed respectively. In order to improve the performances of these probes, several approaches are proposed. A two-dimensional orthogonal path arrangement is propounded to enhance the dimensional measurement ability of MFL-collimation probes, while a high resolution and response speed interrogation method based on differential method is used to improve the accuracy and dynamic characteristics of the FBG probes. The experiments for these special structural fiber probes are given with a focus on the characteristics of these probes, and engineering applications will also be presented to prove the availability of them. In order to improve the accuracy and the instantaneity of the engineering applications, several techniques are used in probe integration. The effectiveness of these fiber probes were therefore verified through both the analysis and experiments.
To enrich the sensing mechanism of the FBG sensors, the cantilever FBG sensor is taken as an example to analyze the effect of the deflection on the embedded stress distribution and structure parameters of the FBG, and a widely applicable analysis method is thus proposed. Models of the single-core and multi-core FBG sensor are built by the proposed method and a modified transmission matrix method is utilized to simulate the built models. The lateral resolution of the multicore FBG sensor is proved to be 1500 times higher than the single-core FBG sensor. Simulation results of the proposed models indicate that this approach is tally with the experiment of other researches, and it can be used to analyze the performance of the designed sensors, such as spectrum signal and resolution, or as a guide of designing FBG sensors.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.