The infrared anti-reflection film is prepared by ion beam assisted thermal evaporation deposition technology. The film has good firmness and can meet the needs of wet transfer. By adjusting the number of layers of the graphene mesh, the electromagnetic shielding and optical transparency properties are simultaneously improved. The infrared anti-reflection film and graphene mesh are combined to design and prepare a compatible electromagnetic shielding infrared anti-reflection film device with sandwich structure. The test results of the device show that the peak transmittance of the graphene mesh/infrared film/substrate/infrared film combination structure in the 3 to 5 μm band is 95.06%, and the average transmittance is 93.40%. The peak shielding effectiveness (SE) in the 12 to 18 GHz frequency band is 14.50 dB, and the average SE is 12.98 dB. It shows that the film device of this structure maintains the high transmittance of the infrared anti-reflection film and has good electromagnetic shielding effectiveness.
In this paper, four continuous graphene films were successfully prepared by adjusting the nucleation density of graphene. The transparent electromagnetic shielding properties of graphene films under different preparation processes were studied. The results show that the electromagnetic shielding effectiveness of the graphene film does not increase with the increase of the growth thickness. Moreover, the graphene of different thicknesses are mainly absorption shielding, and the reflective shielding effectiveness is less than 0.5dB. The sample #1 is a single-layer graphene film with an optical transmittance of 97.3% and an electromagnetic shielding efficiency of 2.11dB. Its good single-layer structure and fewer defects are the reasons for obtaining higher transparent electromagnetic shielding performance.
In order to improve the shielding effectiveness of graphene films, graphene films were prepared by chemical vapor deposition. The effects of hydrogen flow rate, methane flow rate, reaction temperature and reaction time on the electromagnetic shielding properties of the films were investigated. The shielding effectiveness of the film was tested and the preparation process of the film was optimized based on the test results. The results show that when the hydrogen flow rate is 8sccm, the methane flow rate is 15sccm, the reaction temperature is 1030°C, and the reaction time is 30minutes, the shielding effectiveness of the film is 1.2dB (0.3-3000MHz) and the average transmittance is 96%. (400-800nm), the photoelectric comprehensive performance is better.
For the difficulty of measuring thin film thickness, a method of thin film thickness measurement based on laser heterodyne interferometry is proposed. Thin film difference of this method is generated by the relative optical path difference of Michelson interference light path with principle of heterodyne interference. The thickness is got by precision displacement table in line-by-line scaning. The shift of measurement system is about 8nm with constant temperature. Average deviation of measuring results is about 5nm. The comparison with ellipsometer shows the correctness of the method.
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