Ms. Karen Stiers Profile

Karen Stiers

at imec

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper

T. Sarkar, D. Radisic, V. Vega Gonzalez, K. Stiers, C. Sheng, D. Montero, H. Jenkins, M. Demand, P. Wang, F. Lazzarino, N. Horiguchi

Proceedings Volume 12958, 129580B (2024) https://doi.org/10.1117/12.3014213

KEYWORDS: Etching, Optical lithography, Polymers, Semiconducting wafers, Plasma etching, Passivation, Lithography, Plasma, Dry etching, Wafer testing

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Keywords/Phrases